Substrate Support Structure Using Bolt-Free Catching To Prevent Overflow
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Solution Overview
Problem
Bolts used to fasten the upper and lower plates in substrate processing facilities are prone to corrosion and thermal deformation, leading to loosening and potential contamination from chemical solution overflow.
Innovation Solution
A bolt-free fastening structure is implemented using a concave-convex catching unit with catching grooves and protrusions on the support plate and lower cover, along with a locking unit to securely assemble the components without bolts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If bolts are used to fasten the upper plate and lower cover, then the assembly can be easily manufactured and disassembled, but the bolts are prone to corrosion and thermal deformation leading to loosening
Solution Approach 1:
The patent removes the bolt fastening system from the chuck structure and replaces it with a catching unit comprising a catching groove and catching protrusion. This extraction of the problematic bolt component eliminates corrosion and thermal deformation issues while maintaining the fastening function through the groove-protrusion engagement mechanism.
Solution Approach 2:
The patent replaces the traditional mechanical bolt-fastening system with a different mechanical mechanism consisting of a catching groove and catching protrusion. This substitution maintains the fastening function while eliminating the reliability issues associated with bolts in corrosive and thermal environments.
2Device complexity
If bolts are used for fastening, then the structure is simple and easy to assemble, but repeated thermal deformation causes frequent bolt loosening
Solution Approach 1:
The patent extracts the bolt component from the fastening system and replaces it with a catching groove and catching protrusion mechanism. This eliminates the thermal deformation and loosening problems while maintaining structural simplicity through the streamlined groove-protrusion design.
Solution Approach 2:
The patent changes the geometric parameters of the fastening interface by introducing a catching groove with specific depth and width dimensions, and a catching protrusion with corresponding dimensions. These parameter changes create a thermal deformation-resistant fastening mechanism that maintains secure connection under repeated heating and cooling cycles.
3Ease of operation
If bolts are used to secure the lower cover, then the assembly is straightforward, but completely loosened bolts block the chemical solution drain portion causing overflow
Solution Approach 1:
The patent removes the bolt fastening system that could become loose and block the drain portion. Instead, it employs a catching groove and catching protrusion mechanism that prevents loosening entirely, thereby eliminating the harmful effect of chemical solution overflow while maintaining easy assembly operations.
Solution Approach 2:
The patent employs a simple, reliable catching groove-protrusion mechanism that is inherently resistant to corrosion and thermal deformation, providing a durable fastening solution that prevents the harmful effect of drain blocking and chemical solution overflow.
Data Source
AI summary
A support structure, includes: a support plate supporting a substrate; a lower cover covering a lower portion of the support plate; and a catching unit comprising a concave-convex structure having portions corresponding to each other so that the support plate and the lower cover are rotated and assembled with each other.