Substrate Support Tab Geometry for Crack-Free Element Retention
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Solution Overview
Problem
Conventional substrate supports in degas chambers exert excessive pressure on support elements, leading to cracking or breaking during retention, which compromises the integrity and functionality of the support structure.
Innovation Solution
The substrate support features a first plate with multiple tabs disposed around each support element, allowing for reduced pressure retention through a designed bending plane and geometry, minimizing force exertion on the support elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional retention means are used to secure support elements in the heater plate, then the support elements are retained in position, but excessive pressure is exerted on the support elements leading to cracking or breaking
Solution Approach 1:
The patent employs thin tab structures that flexibly engage with the support elements. These tabs act as flexible retention members that can deform under load to accommodate the support elements without exerting excessive concentrated pressure, thereby preventing cracking while maintaining retention.
Solution Approach 2:
The patent changes the retention mechanism from rigid clamping to flexible tab engagement. The tabs are designed with specific geometric parameters (thickness, width, curvature) that allow them to exert distributed pressure rather than concentrated force, changing the stress distribution parameters to prevent support element failure.
2Stability of the object's composition
If support elements are retained with sufficient force to prevent movement, then positioning stability is achieved, but the support elements are subjected to damaging pressure
Solution Approach 1:
The retention force is segmented and distributed across multiple tab structures rather than concentrated at a single point. Each tab provides a portion of the total retention force, distributing the stress across multiple contact points on the support element, thereby maintaining stability while reducing peak pressure.
Solution Approach 2:
The tabs extend in a dimension perpendicular to the main heater plate surface, providing retention through vertical engagement rather than horizontal clamping. This dimensional change allows the tabs to engage the support elements from above, distributing pressure across the top surface area of the support elements rather than concentrating force at edges or points.
Data Source
AI summary
Embodiments of substrate supports are provided herein. In some embodiments, a substrate support includes: a first plate having a plurality of openings extending into the first plate from an upper surface of the first plate to a bottom surface of each respective opening of the plurality of openings; a plurality of tabs comprising three or more tabs disposed in each respective opening and extending towards the upper surface of the first plate; and a plurality of support elements disposed in each of the plurality of openings, wherein the plurality of tabs are disposed around each of the plurality of support elements and configured to retain the plurality of support elements in the plurality of openings.