Multi-Layer Substrate Support for Wide-Range Temperature Control
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Solution Overview
Problem
Existing plasma processing apparatuses struggle to control substrate temperature over a wide range effectively.
Innovation Solution
A support member with a dielectric portion containing a first layer of heaters with one resistance and a second layer of heaters with a different resistance, allowing precise temperature control across a broad range by selectively using these layers based on target temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a single heater is used in the substrate support, then the structure is simple, but the temperature control range is limited
Solution Approach 1:
The substrate support is divided into multiple heater layers (first layer with first heaters and second layer with second heaters), where each layer contains multiple heater elements. This segmentation allows independent control of different heater elements to achieve wide temperature range control while maintaining manageable structural complexity through modular design
Solution Approach 2:
The patent transitions from a single-plane heater configuration to a multi-layer three-dimensional structure. By stacking heater layers at different positions within the substrate support, the system expands the temperature control capability into the vertical dimension, enabling broader temperature ranges without proportionally increasing horizontal complexity
2Temperature
If multiple support members are used for different temperature ranges, then the temperature control range is extended, but the device complexity and manufacturing cost increase
Solution Approach 1:
The substrate support is designed as a universal multi-functional device that can operate across wide temperature ranges by selectively activating different heater layers. The first heaters and second heaters can be independently controlled to accommodate various temperature requirements, eliminating the need for multiple specialized support members for different temperature applications
Solution Approach 2:
Multiple heater systems with different resistance values are merged into a single integrated substrate support structure. The first layer and second layer of heaters are combined within the same support body, allowing the system to achieve the temperature control ranges that would otherwise require separate support members while reducing overall device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise temperature control of substrates over a wide range, enhancing temperature uniformity and reducing the need for multiple support members for different temperatures, facilitating mass production.
Implementation Method 1
The first layer includes at least one first heater. The second layer includes at least one second heater having a resistance different from a resistance of the at least one first heater.
Data Source
AI summary
A support member supports a substrate. The support member includes a dielectric portion, a first layer, and a second layer. The dielectric portion has a substrate support surface. The first layer is in the dielectric portion and includes at least one first heater. The second layer is in the dielectric portion and includes at least one second heater. The at least one second heater has a resistance different from a resistance of the at least one first heater.