Substrate Support Temperature Sensing via Backside Thermal Radiation
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Solution Overview
Problem
Existing non-contact temperature monitoring systems for semiconductor substrates are costly and unable to measure a wide range of temperatures, particularly low temperature ranges, which are necessary for various thermal processes.
Innovation Solution
A non-contact temperature monitoring system that includes a substrate support with a back surface emitting electromagnetic energy, a pedestal hub with a viewport, and a sensor configured to measure the intensity of this electromagnetic energy to determine the apparent temperature of the substrate support.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If direct contact devices such as thermocouples are used to measure substrate support temperature, then temperature measurement is achieved, but thermal drain is created that affects temperature uniformity and energy delivery efficiency
Solution Approach 1:
The patent introduces an optical intermediary (viewport) that allows electromagnetic radiation from the substrate support to pass through to the sensor without the sensor physically contacting the support. This intermediary enables temperature measurement while preventing thermal conduction losses that would occur with direct contact devices like thermocouples.
Solution Approach 2:
The patent replaces the mechanical contact-based temperature measurement system (thermocouples) with an optical/electromagnetic field-based system. The sensor detects thermal radiation emitted by the substrate support through the viewport, eliminating the need for physical contact and the associated thermal drain.
2Ease of manufacture
If conventional pyrometers are used for non-contact temperature measurement, then cost is reduced, but the ability to detect low temperature ranges is insufficient
Solution Approach 1:
The patent employs sensors capable of detecting electromagnetic radiation across multiple wavelength ranges, allowing the system to adapt to different temperature ranges. By selecting appropriate sensor types and wavelengths, the system can effectively measure both low and high temperatures, expanding the operational range while maintaining cost-effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides improved temperature measurement repeatability across wide temperature ranges, reduced thermal loss, and increased energy efficiency compared to conventional monitoring tools.
Implementation Method 1
a sensor configured to measure an intensity of electromagnetic energy emitted from the back surface of the substrate support
Data Source
AI summary
Embodiments of the present disclosure relate to apparatus, systems and methods for substrate processing. A detachable substrate support is disposed within a processing volume of a processing chamber and the substrate support includes a substrate interfacing surface and a back surface. The pedestal hub has a supporting surface removably coupled to the substrate support. A hub volume of the pedestal hub includes temperature measuring assembly disposed therein positioned to receive electromagnetic energy emitted from the back surface of the substrate support. The temperature measuring assembly measures an intensity of the electromagnetic energy entering the assembly and generates intensity signals. An apparent temperature of the substrate is determined based on the intensity signals.