Substrate Support Leveling Mechanism With Independent Tilt Actuators
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Solution Overview
Problem
Existing semiconductor processing systems face challenges in maintaining substrate planarity and temperature control, leading to uniformity issues and interference between heating and plasma generation in substrate support assemblies.
Innovation Solution
The implementation of a substrate support assembly with a two-axis actuation mechanism, including a ball joint and tilt actuators with motors and threaded members, allows for independent adjustment of substrate support planarity relative to the chamber bottom plate, enabling in-situ adjustments and reducing the need for complex motor controllers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If three lift motors are used to adjust substrate support planarity, then planarity control is achieved, but device complexity and space requirements increase
Solution Approach 1:
The actuation mechanism is segmented into two independent axes: a tilt axis for adjusting planarity and a lift axis for vertical movement. This segmentation allows each axis to be controlled separately, reducing the complexity from three coupled motors to two independent actuators while maintaining planarity control capability.
Solution Approach 2:
The mechanism transitions from three-dimensional coupled motion control to two-dimensional independent axis control. By separating tilt and lift movements into orthogonal dimensions, the system achieves planarity adjustment with fewer actuators, reducing space requirements and device complexity.
2Manufacturing precision
If three lift motors are used for planarity adjustment, then substrate support planarity is controlled, but space requirements increase
Solution Approach 1:
The actuation functions are segmented into separate tilt and lift axes, allowing compact arrangement of actuators. The tilt actuators can be positioned at the periphery while the lift mechanism occupies central space, optimizing chamber space utilization.
Solution Approach 2:
By separating tilt and lift movements into independent dimensional axes, the mechanism reduces the footprint required in the chamber. The tilt adjustment occurs in the horizontal plane while lift occurs vertically, allowing more efficient space utilization.
3Area of stationary object
If tilt actuators and lift motors are integrated, then space is saved, but operational independence is reduced
Solution Approach 1:
The actuation system is segmented into independently controllable tilt and lift axes with separate motors. This segmentation maintains operational independence while achieving compact integration, allowing planarity adjustment and vertical positioning to be performed separately without mechanical coupling.
Solution Approach 2:
The mechanism employs dynamic, independently controllable actuators that can operate in any combination. The tilt actuators and lift motor can be actuated independently or simultaneously, providing operational versatility and adaptability while maintaining a compact integrated structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides improved substrate planarity control with a maximum tilt amplitude of at least 0.5 mm, reduces space requirements by replacing three lift motors with a two-axis actuation mechanism, and allows for independent operation of tilt actuators and lift motors.
Implementation Method 1
Each of the plurality of tilt actuators may include a motor. Each of the plurality of tilt actuators may include a threaded member that is coupled with an output of the motor. Each of the plurality of tilt actuators may include a ramp actuator threadingly engaged with the threaded member.
Implementation Method 2
The chambers may include a ball joint that vertically fixes a position of one point of the mounting bracket relative to the bottom plate.
Implementation Method 3
The chambers may include a lift motor coupled with the support stem. The lift motor may be operable to translate the substrate support assembly vertically within the chamber body.
Data Source
AI summary
Exemplary semiconductor processing chambers may include a chamber body. The chambers may include a bottom plate coupled with a bottom surface of the chamber body. The chambers may include a substrate support assembly disposed within the chamber body. The substrate support assembly may include a support plate and a support stem coupled with the support plate. The chambers may include a mounting bracket that couples the support stem with a lower surface of the bottom plate. The chambers may include a plurality of tilt actuators. Each of the tilt actuators may couple the mounting bracket with the lower surface of the bottom plate. Each of the tilt actuators may be operable to adjust a vertical distance between the lower surface of the bottom plate and the mounting bracket at a mounting site of the respective tilt actuator to adjust a planarity of the support plate relative to the bottom plate.