Substrate Supporter Door Mechanism for Fast Chamber Maintenance
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Solution Overview
Problem
The existing substrate processing apparatuses require time-consuming and inefficient disassembly and assembly procedures due to the need to periodically remove and replace components like the electrostatic chuck, which affects operational efficiency.
Innovation Solution
A substrate processing apparatus with a door mechanism that allows the substrate supporter to be easily outputted and inputted into the chamber by opening and closing a door, utilizing a door operating means with a rotation shaft for parallel movement and rotation, enabling efficient disassembly and assembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the chamber is disassembled by separating the lid and body to remove the electrostatic chuck for maintenance, then the electrostatic chuck can be accessed for repair or replacement, but the disassembly and assembly process becomes time-consuming and reduces operational efficiency
Solution Approach 1:
The chamber is divided into separable components (lid and body) that can be easily detached from each other, allowing the electrostatic chuck to be accessed by simply separating these segments rather than disassembling the entire chamber structure
Solution Approach 2:
The electrostatic chuck is extracted as a removable component from the chamber assembly, allowing it to be taken out for maintenance by separating the lid from the body, and the chamber can be reassembled by reversing this extraction process
2Stability of the object's composition
If the electrostatic chuck and associated components are integrated into the chamber structure, then the apparatus maintains structural integrity, but periodic maintenance requires time-consuming disassembly procedures
Solution Approach 1:
The chamber structure transitions from a fixed integrated design to a dynamic separable design, where the lid and body can be easily detached and reattached, allowing the structure to adapt between operational integrity and maintenance accessibility states
Solution Approach 2:
The chamber is designed with pre-configured separation interfaces between the lid and body, allowing maintenance personnel to quickly access the electrostatic chuck without requiring complex disassembly procedures, thus preserving both structural integrity and operational efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the maintenance and replacement of the substrate supporter, reducing the time required for disassembly and assembly, thereby enhancing operational efficiency and reducing the risk of damage to components.
Implementation Method 1
a door operating means including a rotation shaft for straightly moving and rotating the door
Implementation Method 2
The electrostatic chuck fixes the substrate using an electrostatic force
Implementation Method 3
the electrostatic chuck includes a heater therein to heat the substrate up to a process temperature
Data Source
AI summary
A substrate processing apparatus includes: a chamber including a body having an open portion and a door for blocking the open portion; a substrate supporter connected to the door; and a door operating means including a rotation shaft for straightly moving and rotating the door, the door and the body separated in parallel from each other by straightly moving the door.