Substrate Handling Position Teaching Using Stereo Vision Correction
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Solution Overview
Problem
Conventional methods for automating the teaching of substrate conveyance apparatus positions are inefficient and require additional components like simulated substrates or teaching jigs, leading to complex configurations and inaccurate positioning due to deviations in actual target positions from calculated targets.
Innovation Solution
A substrate conveyance apparatus equipped with a pair of imaging units on a movable table that captures images of the substrate holding unit and its surroundings, calculating positional information using stereo vision to correct deviations and simplify the teaching process without additional components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual teaching operation is used to correct positional deviation, then teaching accuracy can be improved, but operator burden increases and teaching time is prolonged
Solution Approach 1:
The patent replaces manual mechanical teaching operations with an automated optical measurement system. Imaging units capture images of the substrate holding unit, and a control unit automatically calculates positional information and corrects deviations, eliminating the need for manual operator intervention while maintaining high teaching accuracy.
Solution Approach 2:
The substrate conveyance apparatus performs self-teaching by automatically capturing its own positional information through imaging units and processing the data to correct positional deviations. The system teaches itself the actual target positions without requiring external manual operation, reducing both time and operational burden.
2Extent of automation
If simulated substrates or teaching jigs are used to automate teaching, then teaching automation is improved, but device complexity increases
Solution Approach 1:
The patent extracts the essential teaching function from complex external components and implements it using the apparatus's own existing imaging units. By removing the need for simulated substrates or teaching jigs and utilizing only the built-in imaging capability, the system achieves automation without increasing device complexity.
Solution Approach 2:
The imaging units, originally designed for observing substrate handling, are made multi-functional by also using them for teaching operations. This universal use of existing components eliminates the need for dedicated teaching components, maintaining simplicity while achieving full automation.
3Productivity
If calculated target positions are used without correction, then teaching speed is improved, but positioning accuracy deteriorates due to assembly errors and wear
Solution Approach 1:
The system uses imaging units to capture actual positions of the substrate holding unit, compares them with calculated target positions, and automatically corrects deviations. This feedback loop maintains high teaching speed while ensuring positioning accuracy by continuously verifying and adjusting positions based on actual measurements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves accurate and automated teaching of substrate positions by correcting positional deviations using imaging units, simplifying the configuration and improving teaching accuracy without the need for additional teaching members.
Implementation Method 1
a pair of imaging units disposed on the movable table at a predetermined interval in a direction intersecting the advancing and retracting directions of the substrate holding unit and configured to capture an image of a region including the substrate holding unit
Data Source
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AI summary
An imaging unit 55 captures an image of a hand unit 43 at a reference position Bs and an image of the hand unit 43 at an advanced position Cs where the hand unit 43 has advanced from the reference position Bs by an advanced amount P1. A position calculation unit 73 calculates an estimated moving amount L1 of the hand unit 43 from each image. A correction coefficient calculation unit 74 calculates a correction coefficient Mk based on the advanced amount P1 and the estimated moving amount L1. A calibration unit 75 calculates a calibrated moving amount H by calibrating a necessary moving amount E calculated based on an image of a conveyance target object with the correction coefficient Mk. Since the calibration unit 75 calibrates a difference between the advanced amount P1 and the estimated moving amount L1, the difference caused by the imaging unit 55 and optical images 81,82 can be eliminated in a configuration in which a position of a conveyance destination using optical images 81,82 captured by the imaging unit 55.