Substrate Testing Cartridge Parallel Probe Alignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate testing apparatuses can only test one substrate at a time, leading to prolonged testing times and reduced production efficiency in semiconductor manufacturing.
Innovation Solution
A substrate testing cartridge system that includes a chuck member, a probe card, and a coupling member to securely and simultaneously test multiple substrates, utilizing mechanical coupling and vacuum adsorption methods for alignment and attachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single probe apparatus is used to test substrates, then the testing process is simple and reliable, but only one substrate can be tested at a time resulting in prolonged testing time
Solution Approach 1:
The testing system is segmented into multiple independent probe cards (first probe card, second probe card, etc.) that can simultaneously test multiple substrates. Each probe card functions as an independent testing unit, allowing parallel processing of multiple substrates to improve throughput while maintaining the reliability of individual testing operations
Solution Approach 2:
Multiple probe cards and substrate chucks are merged into a single integrated testing apparatus. The probe cards are positioned to face multiple substrate chucks simultaneously, enabling the system to test multiple substrates in parallel. This merging of multiple testing stations into one apparatus increases productivity without proportionally increasing system complexity
2Productivity
If multiple substrates are tested simultaneously using multiple probe cards, then testing efficiency is improved, but the device complexity and alignment precision requirements increase
Solution Approach 1:
The testing apparatus is designed with universal, standardized components that can handle multiple substrates using the same basic structure. The substrate chucks and probe cards follow uniform designs that can be replicated and positioned in various configurations, allowing the system to test multiple substrates without requiring fundamentally different components for each position
Solution Approach 2:
Alignment marks are introduced as intermediary features on both the substrates and probe cards to facilitate precise positioning. These marks serve as reference points that simplify the alignment process between multiple probe cards and substrates, reducing the complexity of achieving accurate positioning in a multi-substrate testing system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables efficient testing of multiple substrates simultaneously, reducing testing time and manufacturing time by using mechanical coupling, thereby improving production efficiency and stability in semiconductor processing.
Implementation Method 1
The substrate grabber may be coupled to the substrate through a vacuum adsorption method
Data Source
AI summary
The present invention relates to a substrate testing cartridge provided for simultaneously testing multiple substrates for which a substrate treatment process has been finished, and a method for manufacturing same. According to an embodiment of the present invention, a substrate testing cartridge comprises: a chuck member on which a substrate is placed; a probe card which contacts and tests the substrate and is positioned to face the chuck member with reference to the substrate; and coupling members which couple the substrate, the chuck member, and the probe card, wherein each coupling member comprises: a substrate coupling part which couples the substrate and the chuck member; and a chuck coupling part which couples the probe card and the chuck member.