Substrate Heat Treatment Thermal Center of Gravity Detection
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Solution Overview
Problem
Existing substrate heat treatment apparatuses in semiconductor manufacturing fail to reliably detect partial anomalies in heat treatment conditions, as they primarily focus on temperature differences between the heat treatment plate and set temperature, missing potential partial anomalies.
Innovation Solution
A substrate heat treatment apparatus equipped with temperature sensors positioned across the substrate, calculating the thermal center of gravity to detect heat treatment conditions based on its position, allowing for sensitive detection of partial anomalies by considering both planar and radial thermal distributions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If temperature sensors are positioned across multiple locations of the substrate, then measurement precision of heat treatment condition is improved, but device complexity increases
Solution Approach 1:
The substrate surface is divided into multiple measurement zones with temperature sensors positioned at specific locations (center, intermediate, and peripheral regions). This segmentation allows comprehensive thermal monitoring across different areas, enabling detection of partial anomalies that would be missed by single-point measurement.
Solution Approach 2:
The patent transitions from single-point temperature measurement to two-dimensional spatial temperature distribution measurement by arranging sensors across multiple locations. The thermal center of gravity calculation integrates temperature data from different spatial positions, adding a dimensional aspect to anomaly detection that significantly improves measurement precision.
2Reliability
If thermal center of gravity position is calculated based on multiple temperature sensors, then reliability of anomaly detection is improved, but calculation complexity increases
Solution Approach 1:
The patent applies a mathematical model (thermal center of gravity calculation) to replace complex multi-sensor analysis. By treating temperature-weighted position calculation as a center of gravity problem, the system simplifies the processing of multi-dimensional temperature data into a single representative position metric, improving reliability while keeping calculations manageable.
Solution Approach 2:
The control unit calculates thermal center of gravity position based on temperature-weighted coordinates from multiple sensors. This parameter transformation converts complex temperature distribution patterns into a simplified position metric, enabling reliable anomaly detection through comparison with reference positions without requiring overly complex calculation systems.
3Ease of operation
If temperature monitoring focuses on overall temperature difference, then ease of operation is maintained, but measurement precision of partial anomalies deteriorates
Solution Approach 1:
The thermal center of gravity position serves as an intermediary metric that bridges simple overall temperature monitoring and complex partial anomaly detection. Instead of directly analyzing complex multi-point temperature data, the system uses the calculated thermal center position as an intermediate representation that preserves partial anomaly information while remaining easy to interpret and compare against reference values.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables more reliable detection of heat treatment anomalies by identifying shifts in the thermal center of gravity, improving the accuracy and reliability of heat treatment processes, particularly in cases of partial anomalies like substrate floating.
Implementation Method 1
a plurality of temperature sensors positioned correspondingly to a plurality of locations of the substrate on the placement unit
Implementation Method 2
calculate a position of a thermal center of gravity of the substrate based on the temperatures detected by the temperature sensors
Implementation Method 3
a heat treatment unit for heating or cooling the substrate on the placement unit
Data Source
AI summary
A substrate heat treatment apparatus includes: a placement unit on which a substrate is placed; a heat treatment unit for heating or cooling the substrate on the placement unit; a plurality of temperature sensors positioned correspondingly to a plurality of locations of the substrate on the placement unit; and a control unit. The control unit is configured to control the heat treatment unit based on temperatures detected by the temperature sensors, to calculate a position of a thermal center of gravity of the substrate based on the temperatures detected by the temperature sensors, and to detect heat treatment condition of the substrate based on the position of the thermal center of gravity.