Substrate Thickness Measurement With Temperature-Based Correction
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Solution Overview
Problem
Existing substrate thickness measurement technologies face challenges in maintaining accuracy due to temperature variations, which affect the precision of thickness measurements.
Innovation Solution
A substrate thickness measuring device that includes a substrate holder, a thickness measurer, a housing, a temperature measurer, and a thickness corrector. The corrector calculates a corrected thickness by multiplying the measured thickness with a preset correction coefficient and adjusts this coefficient when the temperature measured falls out of a preset range, thereby improving measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If temperature variation occurs during substrate thickness measurement, then measurement accuracy deteriorates, but maintaining constant temperature increases device complexity
Solution Approach 1:
The patent applies parameter changes by introducing a temperature correction coefficient that adjusts the thickness measurement based on detected temperature variations. Instead of maintaining constant temperature through complex control systems, the measurement parameter (thickness) is dynamically corrected using the relationship between temperature and thermal expansion, thereby resolving the contradiction between measurement accuracy and device complexity
Solution Approach 2:
The patent replaces the mechanical/physical approach of temperature control (active heating or cooling systems) with a computational correction method. By using a temperature sensor and correction coefficient algorithm, the system substitutes complex thermal control mechanics with simpler sensing and calculation, reducing device complexity while maintaining measurement accuracy
2Measurement precision
If a correction coefficient is introduced to compensate for temperature variation, then measurement accuracy improves, but the correction process increases system complexity
Solution Approach 1:
The correction coefficient serves as a parameter change mechanism that adjusts the measurement output based on temperature conditions. This simple multiplicative correction factor provides accurate compensation without requiring complex correction algorithms or multiple sensors, thereby improving measurement precision while minimizing the increase in system complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the measurement accuracy of substrate thickness by compensating for temperature-induced variations, ensuring more precise results.
Implementation Method 1
a first correction amount for correcting a measurement value of the film thickness from the humidify measured by the humidity measurer and the information stored in the storage
Implementation Method 2
calculating, as a corrected thickness, a product of the thickness measured by the thickness measurer and a preset correction coefficient, and changing a setting of the correction coefficient when the temperature measured by the temperature measurer falls out of a preset allowable range
Data Source
AI summary
A substrate thickness measuring device includes a substrate holder, a thickness measurer, a housing, a temperature measurer and a thickness corrector. The substrate holder is configured to hold a substrate. The thickness measurer is configured to measure a thickness of the substrate held by the substrate holder. The housing accommodates therein the substrate holder and at least a part of the thickness measurer. The thickness corrector is configured to correct the thickness measured by the thickness measurer. The thickness corrector performs: calculating, as a corrected thickness, a product of the thickness measured by the thickness measurer and a preset correction coefficient, and changing a setting of the correction coefficient when the temperature measured by the temperature measurer falls out of a preset allowable range.