Unified Display of Trace and Video Data for Substrate Troubleshooting
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Solution Overview
Problem
In substrate processing apparatuses, identifying the cause of troubles is laborious due to the large amount of sensor data and the need to organize trace information, which hinders rapid diagnosis, and there is a lack of an effective environment to confirm the situation around the apparatus simultaneously with the trace information.
Innovation Solution
A display method that acquires and displays trace information and video image information for a specific period around the time of trouble occurrence, allowing operators to view sensor data and gas flow animations in conjunction, thereby simplifying the identification of trouble causes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If operators manually organize and analyze sensor data to identify trouble causes, then diagnostic accuracy can be achieved, but the process becomes laborious and time-consuming
Solution Approach 1:
The system automatically performs preliminary actions by acquiring and organizing trace information (sensor data, alarm data, operation data) and video image information before the operator needs to diagnose. The information processing apparatus pre-processes and correlates multiple data types, so when a trouble occurs, the prepared information is immediately available for display, eliminating the need for operators to manually organize data during the diagnostic process
Solution Approach 2:
The system creates a comprehensive copy of the apparatus state by acquiring trace information from multiple sensors and video image information from cameras, then displays these copies simultaneously. This allows operators to view replicated data representations without accessing the actual physical sensors or cameras, saving time while maintaining diagnostic accuracy
2Reliability
If operators need to confirm apparatus state with trace information, then accurate diagnosis is possible, but the complexity of organizing multiple data types increases
Solution Approach 1:
The information processing apparatus merges multiple data types (sensor trace information, alarm data, operation data, and video image information) into a unified display. The display unit presents all these different data types together in a coordinated manner, allowing operators to confirm apparatus state with reliable information without dealing with the complexity of organizing separate data sets manually
Solution Approach 2:
The information processing apparatus acts as an intermediary between the complex data sources and the operator. It acquires data from multiple sensors and cameras, processes and correlates this information, then presents it in an organized display format. This intermediary function shields operators from data organization complexity while maintaining diagnosis reliability
3Loss of information
If comprehensive sensor data is collected for troubleshooting, then complete diagnostic information is available, but the ease of operation decreases due to data volume
Solution Approach 1:
The system extracts only the relevant trace information and video image information needed for diagnosis from the comprehensive sensor data. The information processing apparatus selectively acquires data within a specific time period around the trouble occurrence, extracting essential information while excluding unnecessary data, thus maintaining information completeness while improving ease of operation
Solution Approach 2:
The display unit segments the comprehensive data into organized sections, presenting trace information and video image information in distinct but coordinated areas. This segmentation makes the complete diagnostic information more accessible by breaking it into manageable visual segments rather than presenting it as an overwhelming undifferentiated mass
Data Source
AI summary
A display method includes acquiring history information of data, including sensor data detecting a state of a substrate processing apparatus and image data displaying the state of the substrate processing apparatus, from a plurality of pieces of data managed by the substrate processing apparatus; acquiring alarm information including a date and time of occurrence at which a specific event occurred in the substrate processing apparatus; determining, as trace information to be displayed, sensor data for a specific period including the date and time of occurrence included in the alarm information, among the history information of the data; determining, as video image information to be displayed, image data for the specific period including the date and time of occurrence included in the alarm information, among the history information of the data; and displaying, on a display, at least one of the trace information and the video image information.