Substrate Transfer Air Duct Layout for Particle Deposition Control
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Solution Overview
Problem
During substrate transfer processes in integrated circuit fabrication, airflow generated by moving robots can lead to foreign substances settling on substrates, causing defects, which existing technologies have not adequately addressed.
Innovation Solution
A substrate transfer unit with a rail part, vertical part, main duct parts, and auxiliary duct parts that utilize fluid flow paths and airflows to minimize particle settlement, featuring outlets, through holes, and expansion spaces to direct airflows and foreign substances away from substrates, and includes fans and screens to enhance airflow directionality and reduce particle deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a robot moves vertically or horizontally to transfer substrates, then substrate transfer is achieved, but airflow is generated that causes foreign substances to settle on substrates resulting in defects
Solution Approach 1:
The patent converts the harmful upward airflow generated by robot movement into a beneficial downward airflow by strategically placing outlets on the bottom surface of the cleanroom module. This downward airflow counteracts the upward motion of foreign substances, preventing them from settling on substrates while maintaining efficient substrate transfer operations.
Solution Approach 2:
The patent introduces air outlets as an intermediary element that mediates between the robot's movement and the substrate. By controlling airflow through these outlets, the system creates a protective air curtain that prevents foreign substances from reaching substrates, thus decoupling the harmful effect of robot movement from the substrate.
2Manufacturing precision
If downward airflow is generated to prevent foreign substance settlement, then substrate cleanliness is improved, but additional airflow control components are required
Solution Approach 1:
The bottom surface of the cleanroom module serves multiple functions: it acts as a structural component, a mounting surface for outlets, and an airflow generation interface. By integrating the airflow control function into the existing structural design rather than adding separate components, the patent achieves substrate protection without proportionally increasing device complexity.
Solution Approach 2:
The system uses the same air supply infrastructure that supports robot operation to also provide substrate protection. The airflow outlets are positioned to utilize the natural pressure differentials and flow patterns created during normal operation, allowing the system to protect substrates using its own operational resources without requiring entirely separate airflow control systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces substrate defects by minimizing the settlement of foreign substances, ensuring cleaner substrates and improved process quality through controlled airflow management.
Implementation Method 1
having, provided therein, one or more fans which generate downward airflows
Implementation Method 2
first flow paths that a fluid is introduced into and passes through; main duct parts having, formed therein, second flow paths which communicate with the first flow paths
Data Source
AI summary
A substrate transfer unit is provided. The substrate transfer unit includes: a rail part having a length in a horizontal direction; a vertical part moving along the rail part, guiding the vertical movement of a robot, which transfers a substrate, and having, formed therein, first flow paths that a fluid is introduced into and passes through; main duct parts having, formed therein, second flow paths which communicate with the first flow paths, having first end portions connected to the vertical part, and including outlets, which are formed at second end portions of the main duct parts and face a bottom surface of the index module, and through holes, which are formed on one or both sides of each of the second end portions; and auxiliary duct parts surrounding the through holes at the second end portions of the main duct parts and having, formed therein, expansion spaces which communicate with the second flow paths.