Substrate Transfer Chamber Layout for Faster Batch Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing batch-type substrate processing apparatuses face inefficiencies in substrate transport and processing due to the time-consuming nature of transporting substrates to process chambers.
Innovation Solution
A substrate processing apparatus with a configuration that includes process chambers, supports, a transporter, a transfer chamber, a transport chamber, and a delivery chamber, allowing for simultaneous handling and management of multiple substrates, enhancing transport efficiency through coordinated control by a controller.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrates are transported one by one to process chambers using a transporter, then substrate processing can be performed, but transport time is long and transport efficiency is low
Solution Approach 1:
The system divides substrate handling into separate functional chambers: a delivery chamber for preparing supports, a transport chamber for moving transporters, and process chambers for substrate treatment. This segmentation allows simultaneous operations in different chambers, improving overall transport efficiency and reducing total processing time.
Solution Approach 2:
The delivery chamber prepares substrate supports in advance by loading substrates onto supports before they are needed in the process chambers. This preliminary action ensures that supports are ready for immediate transfer, eliminating waiting time and improving transport efficiency.
2Productivity
If multiple substrates are processed simultaneously using batch-type apparatus, then throughput increases, but transport complexity and device complexity increase
Solution Approach 1:
The batch processing system is segmented into multiple independent chambers (delivery chamber, transport chamber, process chambers) that can operate semi-independently. Each chamber has a specific function, which simplifies the control logic within each chamber while enabling complex multi-substrate processing across the entire system.
Solution Approach 2:
The transport chamber acts as an intermediary between the delivery chamber and process chambers, managing the movement of transporters and supports. This intermediary function centralizes the complexity of coordinate control in a dedicated chamber, simplifying the overall system architecture while enabling efficient multi-substrate handling.
3Loss of time
If substrate support stages are transported instead of individual substrates, then transport time is reduced, but coordination complexity between chambers increases
Solution Approach 1:
The system separates the functions of support preparation (delivery chamber), transporter movement (transport chamber), and substrate processing (process chambers). This segmentation allows each chamber to focus on its specific task, reducing the coordination complexity while enabling rapid support transport across chambers.
Solution Approach 2:
Each chamber is equipped with its own transporter and control system, allowing chambers to independently manage their local operations. The transport chamber autonomously manages transporter movement, while process chambers independently handle substrate processing, reducing inter-chamber coordination complexity while maintaining efficient support transport.
Data Source
AI summary
There is provided a technique that includes: at least one process chamber configured to be capable of processing a substrate; one or more supports configured to be capable of supporting the substrate; a transporter configured to be capable of transporting the one or more supports; a transfer chamber configured to be capable of transferring the substrate; a transport chamber that is adjacent to the transfer chamber and the at least one process chamber and is configured to be capable of moving the transporter; and a delivery chamber that is disposed in the transport chamber and is configured to be capable of delivering the one or more supports.