Load Lock Camera Inspection for Substrate Transfer Calibration
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Solution Overview
Problem
Current inspection systems for film deposition processes on glass and wafers are inadequate in detecting defects and evaluating process parameters, such as substrate location, fixture status, electrode sagging, and transfer robot performance, leading to limitations in ensuring the quality and accuracy of the deposition process.
Innovation Solution
A camera-based inspection system that captures and analyzes images of the glass substrate and film-deposited substrate at multiple stages, using controllers to evaluate defects, film edge lines, reflectiveness, and refractiveness, as well as the operation accuracy of loading and transfer robots, to provide comprehensive analysis and feedback.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple cameras are used to capture images at multiple stages, then measurement precision and defect detection capability are improved, but device complexity increases
Solution Approach 1:
The inspection system is segmented into multiple camera modules, each positioned to capture specific regions or stages of the substrate processing. This segmentation allows comprehensive defect detection across different locations and process stages while maintaining manageable complexity through modular design.
Solution Approach 2:
The camera modules serve multiple functions: capturing substrate images, monitoring film deposition, detecting defects, and evaluating process parameters. This multi-functionality reduces the need for separate inspection systems for each function, thereby improving measurement precision without proportionally increasing device complexity.
2Manufacturing precision
If comprehensive image analysis is performed to evaluate multiple process parameters, then manufacturing precision is improved, but loss of time increases
Solution Approach 1:
Images are captured at multiple predetermined stages of the deposition process (before deposition, during deposition, after deposition). This preliminary action allows comprehensive analysis to be performed on already-captured images rather than requiring continuous monitoring, thereby improving manufacturing precision without excessive time loss.
Solution Approach 2:
The system provides feedback by analyzing captured images and comparing them against quality standards. This feedback mechanism enables real-time or near-real-time evaluation of deposition precision, allowing for rapid adjustments without requiring extensive inspection time at each stage.
Data Source
AI summary
This application relates to a method of inspection and an inspection system for the film deposition process for substrates that includes glass and wafer. The inspection system includes multiple camera modules positioned in a load lock unit of a process chamber, such as the camera modules that can capture images of the substrate in the load lock. The images are analyzed by a control unit of the inspection system to determine the accuracy of robots in handling the substrate, calibration of the robots based on the analysis, and defects in the substrate caused during the handling and deposition process.