Substrate Transfer Device Cassette Position Correction
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Solution Overview
Problem
Existing substrate processing apparatuses face difficulties in accurately accommodating substrates in cassettes, especially when the cassette is not properly mounted or slightly inclined, leading to deviations between the target and actual accommodation positions.
Innovation Solution
A substrate transfer device equipped with a detection unit to determine the actual accommodation position and a correction unit to adjust the target position for subsequent substrates, ensuring accurate placement by calculating the deviation between the target and actual positions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is accommodated according to a target accommodation position previously stored, then the substrate transfer process can be automated and efficient, but the substrate may not be appropriately accommodated when the cassette is inclined or not properly mounted
Solution Approach 1:
The system performs preliminary detection of the cassette's actual accommodation positions before substrate transfer. The detection unit measures the actual positions of substrate accommodation slots in the cassette, and the control device calculates correction amounts based on the difference between actual and target positions. This preliminary action ensures that subsequent substrate transfers are accurately positioned even when the cassette is inclined or improperly mounted.
Solution Approach 2:
The system implements a feedback mechanism where the detection unit continuously monitors the actual accommodation positions of substrates in the cassette. The control device uses this feedback information to calculate correction amounts and adjust the target accommodation positions for subsequent substrate transfers. This closed-loop feedback ensures high positioning accuracy while maintaining automated transfer efficiency.
2Adaptability or versatility
If the cassette is not properly mounted or is slightly inclined, then the actual accommodation position deviates from the target accommodation position, but the system should still accommodate substrates appropriately
Solution Approach 1:
The system dynamically changes the parameter of target accommodation positions based on detected actual positions. When the cassette is inclined or improperly mounted, the detection unit measures the deviation, and the control device calculates correction amounts to adjust the target positions. This parameter adjustment allows the system to adapt to various cassette mounting conditions while maintaining precise substrate accommodation.
Solution Approach 2:
Before substrate transfer, the system performs preliminary detection and calculation of correction amounts for the specific cassette being used. This preliminary action compensates for inclination or improper mounting, enabling the system to handle various cassette conditions with high precision.
3Manufacturing precision
If a detection unit is added to detect actual accommodation positions, then substrate placement accuracy can be improved, but the device complexity increases
Solution Approach 1:
The detection unit serves multiple functions: detecting actual accommodation positions, determining deviation from target positions, and providing data for correction amount calculation. This multi-functionality reduces the need for separate systems and minimizes overall device complexity while achieving high positioning accuracy.
Solution Approach 2:
The system replaces complex mechanical adjustment mechanisms with a detection-and-calculation approach. Instead of using mechanical devices to physically adjust cassette positioning, the system uses detection units to measure deviations and calculates correction amounts for substrate transfer positioning, simplifying the overall system while maintaining precision.
Data Source
AI summary
A substrate can be appropriately accommodated in a cassette. A substrate transfer device includes a substrate transfer unit that delivers the substrate with respect to the cassette configured to accommodate the substrate; a detection unit that detects the substrate accommodated in the cassette; and a control device than controls the substrate transfer unit. Further, the control device includes a transfer control unit configured to control the substrate transfer unit to accommodate the substrate at a predetermined target accommodation position; a determination unit configured to determine an actual accommodation position for the substrate based on a detection result of the detection unit after the detection unit detects the substrate accommodated in the cassette; and a correction unit configured to correct a predetermined target accommodation position as an accommodation position for another substrate based on a difference between the actual accommodation position and the target accommodation position for the substrate.