Substrate transfer apparatus

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Solution Overview

Problem

In substrate transfer apparatuses, gaps between fan filter units and chamber sidewalls create backward-facing step flow recirculation regions, delaying the discharge of contamination particles and causing surface contamination.

Innovation Solution

Incorporating an inclined surface in the chamber at the corner portions where the fan filter unit is mounted, which reduces the gap between the fan filter unit and the sidewall, preventing the formation of recirculation regions by ensuring air flows directly into the chamber without reversing along the sidewall surfaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If fan filter units are mounted on the upper surface of the chamber, then clean air can be introduced into the chamber, but gaps between the fan filter units and chamber sidewalls create recirculation regions that delay contamination particle discharge

Engineering Contradiction:

Improvecleanliness maintenanceVSAvoidrecirculation region formation

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent introduces an inclined surface that extends from the upper surface toward the sidewall, creating a three-dimensional geometric feature. This inclined surface modifies the airflow path by providing a sloped transition zone that prevents the formation of recirculation regions, thereby resolving the contradiction between maintaining cleanliness and preventing harmful recirculation flows.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The inclined surface creates a curved or sloped geometry instead of a sharp corner between the upper surface and sidewall. This curved transition modifies the airflow pattern, eliminating the backward-facing step that causes recirculation, while still allowing the fan filter unit to effectively introduce clean air into the chamber.

Inventive Principle:

Principle #14Spheroidality (Curvature)

2Ease of manufacture

If gaps are present between fan filter units and chamber sidewalls due to mounting conditions, then fan filter units can be installed, but recirculation regions form in corner portions causing contamination

Engineering Contradiction:

Improvefan filter unit installationVSAvoidsidewall surface contamination

Core Design Contradiction:

Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The inclined surface extends in the vertical dimension from the upper surface toward the sidewall, creating a sloped barrier that prevents contaminated air recirculation. This three-dimensional feature addresses the gap issue without complicating the mounting process, as it is integrated into the chamber structure itself.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The inclined surface acts as an intermediary structure between the fan filter unit mounting area and the chamber sidewall. It provides a transition zone that guides airflow away from the sidewall corner, preventing contamination while accommodating the mounted fan filter unit.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Productivity

If air flows downwardly within chambers by fan filter units, then contamination particles can be exhausted, but air flows backwards along sidewall surfaces delaying particle discharge

Engineering Contradiction:

Improvecontamination particle dischargeVSAvoidair flow velocity

Core Design Contradiction:

ProductivityVSSpeed

Solution Approach 1:

The inclined surface creates a smooth curved transition that guides airflow downward without creating sharp corners where recirculation can occur. This curved geometry maintains high air flow velocity by preventing flow separation and backward movement along the sidewalls, thereby improving contamination particle discharge efficiency.

Inventive Principle:

Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design effectively inhibits the occurrence of recirculation regions, enhancing the discharge of contamination particles and reducing surface contamination, thereby maintaining cleanliness within the chamber.

Implementation Method 1

a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber

Methodology Applied

Scientific EffectPressure difference: Pressure Gradient

Implementation Method 2

The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit

Methodology Applied

Scientific EffectFlow direction control:

Data Source

PatentUS10522379B2Substrate transfer apparatus

Publication Date: 2019.12.31 SAMSUNG ELECTRONICS CO LTD

AI summary

A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.