Substrate Transfer Carrier Layout for Throughput and Clean Handling
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Solution Overview
Problem
Current substrate processing apparatuses face challenges in reducing costs and improving throughput due to the complexity of substrate handling and processing, particularly in transferring substrates between different modules and maintaining independent atmospheres.
Innovation Solution
The apparatus incorporates multiple container movers and a substrate carrier system with robots to efficiently transfer substrates between process modules, utilizing a third container mover to carry storage containers between first and second container movers, thereby reducing the need for maintaining inert gas atmospheres during transfer and minimizing component complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrates are transferred between process chambers using a single transfer machine, then the apparatus structure is simplified, but the throughput is limited and handling complexity increases
Solution Approach 1:
The transfer system is segmented into multiple independent container movers (first, second, and third container movers) that operate separately to handle different transfer tasks. This segmentation allows parallel operations and improves throughput while distributing the handling complexity across multiple specialized components rather than one complex transfer machine.
Solution Approach 2:
The substrate carrier acts as an intermediary component between the first and second container movers. It receives substrates from the first container mover, holds them in a controlled environment, and transfers them to the second container mover. This intermediary structure simplifies the overall handling by providing a stable intermediate platform rather than requiring direct complex coordination between all components.
2Reliability
If independent atmospheres are maintained in each process chamber, then processing quality is improved, but the cost and structural complexity increase
Solution Approach 1:
The substrate carrier is extracted as a separate atmospheric control zone between the process chambers. It maintains its own independent atmosphere (typically inert gas) separately from the process chambers, allowing each chamber to maintain its optimized processing atmosphere without being directly coupled. This extraction reduces the complexity of atmospheric management compared to fully coupled systems while preserving the benefits of independent atmosphere control.
3Object-affected harmful factors
If pressure-reducing structures are implemented for substrate transfer, then contamination is prevented, but the cost and apparatus complexity increase
Solution Approach 1:
The substrate carrier and transfer paths are filled with inert gas atmosphere (such as nitrogen or rare gases) to prevent oxidation and contamination of substrates during transfer. This inert environment provides effective contamination prevention without requiring complex vacuum systems or pressure-reducing structures, as the inert gas creates a protective atmosphere at atmospheric pressure.
Data Source
AI summary
Provided is a technique including: a first container mover capable of moving a container; a second container mover disposed at a position different from the first container mover and capable of moving the container; a plurality of process modules capable of processing a substrate in the container; a substrate carrier disposed between the first container mover and the second container mover, configured to be communicable with the plurality of process modules, and capable of carrying the substrate; a substrate carry robot provided in the substrate carrier and capable of carrying the substrate to the process module; a third container mover disposed between the first container mover and the second container mover, and capable of moving the container from the first container mover to the second container mover; and a controller.