Substrate Transfer Layout for Multi-Chamber Cleaning Throughput
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Solution Overview
Problem
The existing single cleaning apparatus in semiconductor manufacturing has insufficient treatment capacity due to increased inefficiency in substrate transfer as the number of cleaning chambers increases, leading to reduced production capacity.
Innovation Solution
A substrate treatment apparatus with a front-end module and treatment module configuration, utilizing a transfer manipulator and process manipulators that move horizontally and vertically to connect multiple treatment units, allowing simultaneous and efficient substrate transfer between carriers, lifting buffer boxes, and treatment chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of cleaning chambers is increased to improve treatment capacity, then the production capacity is improved, but the transmission channel distance is extended which reduces transfer efficiency
Solution Approach 1:
The treatment module is divided into multiple independent treatment units (first treatment unit to Nth treatment unit), each with its own buffer box and process manipulator. This segmentation allows parallel processing of substrates in different units, increasing treatment capacity without requiring a single long transmission channel, thus maintaining transfer efficiency while improving productivity
Solution Approach 2:
Buffer boxes are introduced as intermediary storage components between treatment chambers and the front-end module. These buffer boxes decouple the transfer process from the treatment process, allowing substrates to be pre-positioned in buffer boxes while treatment operations proceed independently, thereby eliminating waiting time and improving both treatment capacity and transfer efficiency
2Productivity
If the number of cleaning chambers is increased to improve treatment capacity, then the production capacity is improved, but the apparatus complexity increases
Solution Approach 1:
The system is segmented into standardized treatment units that can be configured in different numbers (N ≥ 2) depending on production requirements. Each unit follows the same modular structure with buffer box and process manipulator, making the system scalable without proportionally increasing overall complexity
Solution Approach 2:
The buffer boxes and process manipulators are designed as universal components that serve multiple functions: storing substrates, transferring between treatment chambers, and coordinating with the front-end module. This multi-functionality reduces the need for specialized components, thereby improving treatment capacity while controlling apparatus complexity
Data Source
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AI summary
The present invention provides a substrate treatment apparatus. The substrate treatment apparatus is connected in series with a plurality of vertically moving process manipulators by a horizontally moving transfer manipulator, so as to realize the transmission of the substrate from the front end to the back end of the apparatus, or the transmission of the substrate from the back end to the front end of the apparatus. The transfer manipulator transmits a plurality of substrates at one time, which can ensure that a plurality of substrates to be processed or processed substrates handled by the process manipulators can be transferred in time. The process manipulators move in the vertical direction to be responsible for the transmission tasks of a plurality of treatment chambers. The moving stroke of each process manipulator is shortened and the load is uniform, which is beneficial to reducing the time interval of substrate transmission, improving the transmission efficiency of the substrate, reducing the idle time of the treatment chambers, and further improving the overall production capacity of the apparatus.