Substrate Transfer Module Layout for Compact Cleanroom Footprint
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Solution Overview
Problem
The increasing number of process modules in substrate processing systems leads to a large installation area, making it difficult to arrange multiple systems in clean rooms or similar spaces.
Innovation Solution
A substrate transfer system with a load-lock module and an atmospheric transfer module having specific sidewalls and load ports arranged to reduce the system's footprint, allowing for a more compact configuration by positioning load ports on different sidewalls and using transfer robots to manage substrate transfer between modules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of process modules is increased to process more substrates, then the processing capacity is improved, but the installation area becomes larger
Solution Approach 1:
The atmospheric transfer module utilizes three-dimensional space by arranging load ports on different sidewalls (first sidewall, second sidewall, third sidewall) rather than linearly extending in one direction. This spatial arrangement allows substrates to be transferred between multiple process modules simultaneously, increasing processing capacity while maintaining a compact footprint.
Solution Approach 2:
The atmospheric transfer module serves multiple functions: it transfers substrates between process modules, provides pressure transition capability, and accommodates multiple load ports for simultaneous operations. This multi-functionality reduces the need for separate dedicated modules for each function, thereby reducing overall installation area.
2Productivity
If multiple load ports are added to increase substrate transfer capability, then the transfer capacity is improved, but the device complexity increases
Solution Approach 1:
Multiple load ports (first load port, second load port, third load port) are integrated into a single atmospheric transfer module rather than creating separate transfer modules for each port. This consolidation allows the module to handle multiple substrate transfers simultaneously while maintaining a unified control and structural design, thereby increasing transfer capacity without proportionally increasing complexity.
3Area of stationary object
If the atmospheric transfer module is configured with multiple sidewalls and load ports, then the space utilization is improved, but the manufacturing complexity increases
Solution Approach 1:
The atmospheric transfer module is divided into distinct functional sections corresponding to different sidewalls (first sidewall with first load port, second sidewall with second load port, third sidewall with third load port). This segmentation allows each section to be manufactured and tested independently before assembly, reducing overall manufacturing complexity while achieving high space utilization through the multi-sidewall configuration.
Data Source
AI summary
This substrate transfer system is provided with: a load-lock module; an atmospheric transfer module having a first sidewall, a second sidewall and a third sidewall, the first sidewall extending along a first direction and connected to the load-lock module, the second sidewall extending along a second direction perpendicular to the first direction, the third sidewall being disposed on an opposite side of the second sidewall; a first load port extending outward from the second sidewall along the first direction; and a second load port extending outward from the third sidewall along the first direction.