Substrate Transfer Layout for Compact Multi-Tank Processing
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Solution Overview
Problem
The existing substrate processing devices experience an increase in size as the number of processing tanks increases, leading to inefficiencies in design and functionality.
Innovation Solution
A substrate processing module is designed with a first tank and a second tank arranged in a first direction, utilizing a first transport unit for substrate movement and a second transport unit that intersects the first direction, featuring a chuck and an actuator positioned on the side of the first tank, allowing for efficient transfer between tanks without extending the device's main transport direction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple processing tanks are arranged in the main transport direction, then the substrate can be processed through multiple tanks, but the device size in the main transport direction increases
Solution Approach 1:
The patent introduces a second transport direction that intersects with the first transport direction. The second transport unit moves substrates in this intersecting direction to transfer between first transport units, allowing multiple processing tanks to be accessed without extending the device in the main transport direction. This dimensional change enables compact arrangement of multiple tanks while maintaining processing capability.
2Length of moving object
If the second transport unit transfers substrate above the first tank, then the device size is reduced, but the actuator placement becomes constrained
Solution Approach 1:
The actuator is positioned in the vertical direction (third direction) above the first tank, utilizing the vertical dimension for actuator placement rather than consuming horizontal space. This allows the second transport unit to operate in the horizontal plane above the tank while the actuator provides vertical movement control, resolving the spatial conflict between compact transport path and actuator placement.
Data Source
AI summary
A substrate processing module of a substrate processing device includes a first tank and a second tank that are arranged in a first direction and in which a substrate can be disposed, first transport units and that move the substrate into the second tank and the first tank, and a second transport unit that transports the substrates in a second direction intersecting the first direction and transfers the substrates to and from the first transport units. The second transport unit includes a chuck that holds the substrate and passes above the first tank, and an actuator that moves the chuck in the second direction. The actuator of the second transport unit is disposed on a side of the first tank in the first direction in the substrate processing module.