Substrate Processing Transfer Timing for Solution Drag-Out Reduction

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing substrate processing systems face challenges in minimizing the drag-out of expensive processing solution, require manual parameter changes leading to potential human errors, and lack flexibility in adjusting between peak and slack periods to optimize throughput and solution usage.

Innovation Solution

An apparatus with a controller that dynamically switches between an ordinary mode for maximum throughput and a processing solution saving mode during slack periods, based on demand, by adjusting transfer time tables to elongate substrate pull-out times and reduce solution usage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the substrate is pulled out quickly from the processing tank to maximize throughput, then the productivity is improved, but the processing solution is dragged out excessively causing waste

Engineering Contradiction:

ImprovethroughputVSAvoidprocessing solution drag-out

Core Design Contradiction:

ProductivityVSLoss of substance

Solution Approach 1:

The system dynamically adjusts the pull-out speed of the substrate based on real-time conditions. During peak periods, faster pull-out speeds are used to maximize throughput. During slack periods, slower pull-out speeds are employed to minimize processing solution drag-out, allowing the system to adapt its behavior to current operational demands

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The transfer time table parameters are dynamically modified based on the operational period. The system changes the pull-out time parameter from a fixed value to a variable that can be adjusted between a first value (faster pull-out) for peak periods and a second value (slower pull-out) for slack periods, thereby optimizing both productivity and solution conservation

Inventive Principle:

Principle #35Parameter changes

2Loss of substance

If manual parameter changes are made to save processing solution, then the processing solution consumption is reduced, but the operation complexity and potential for human error increase

Engineering Contradiction:

Improveprocessing solution consumptionVSAvoidparameter adjustment complexity

Core Design Contradiction:

Loss of substanceVSEase of operation

Solution Approach 1:

The system automatically determines whether the current period is a peak or slack period and self-adjusts the transfer time table parameters accordingly. The controller autonomously selects the appropriate pull-out time parameter (first value or second value) based on real-time operational conditions, eliminating the need for manual intervention and reducing the risk of human error

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The system continuously monitors operational conditions and uses this feedback to automatically adjust parameters. By detecting the operational period (peak or slack) and responding with appropriate parameter changes, the system creates a closed-loop control mechanism that optimizes processing solution usage without requiring manual input

Inventive Principle:

Principle #23Feedback

3Productivity

If the transfer time table is fixed for maximum throughput, then the productivity is maximized, but the system lacks flexibility to adapt to different operational periods

Engineering Contradiction:

ImprovethroughputVSAvoidflexibility to adjust between peak and slack periods

Core Design Contradiction:

ProductivityVSAdaptability or versatility

Solution Approach 1:

The transfer time table is transformed from a static configuration to a dynamic one that can adapt to different operational periods. The system maintains multiple parameter sets (first pull-out time value for peak periods, second pull-out time value for slack periods) and automatically selects the appropriate set based on current conditions, providing both high throughput capability and operational flexibility

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The transfer time table is designed to serve multiple functions: it can operate in a maximum throughput mode during peak periods and switch to a solution conservation mode during slack periods. This multi-functionality allows a single system to optimize for different objectives depending on operational demands

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS12598941B2Apparatus for processing substrate, device of controlling apparatus for processing substrate, method of controlling apparatus for processing substrate, and storage medium that stores program

Publication Date: 2026.04.07 EBARA CORP

AI summary

One object of the present disclosure is to flexibly and promptly save a processing solution in an apparatus for processing a substrate. An apparatus for processing a substrate is configured to change over a transfer time table between an ordinary mode that has a maximum throughput of the apparatus for processing the substrate and a processing solution saving mode that saves a processing solution in at least one of processing tanks. The apparatus for processing the substrate determines whether or not the apparatus for processing the substrate is in a slack period that has a small demand output by the apparatus for processing the substrate, based on a rate-controlling point that limits a processing speed of the entire apparatus for processing the substrate, and sets the transfer time table to the processing solution saving mode when it is determined that the apparatus for processing the substrate is in the slack period, while setting the transfer time table to the ordinary mode when it is determined that the apparatus for processing the substrate is not in the slack period.