Substrate Transfer Robot End Effector Sagging Detection

The system performs preliminary detection of end effector sagging and misalignment using light emitting/receiving portions before the positioning errors affect substrate transfer accuracy. The control unit continuously monitors the position of the end effector relative to the substrate, enabling early detection of deterioration trends and allowing maintenance to be scheduled before critical failures occur.

The system implements continuous feedback monitoring of the end effector's position and orientation relative to the substrate using optical sensors. The control unit compares detected positions with reference values and generates abnormality signals when deviations exceed thresholds. This feedback mechanism enables condition-based maintenance, where the end effector is maintained only when actual deterioration is detected, rather than following fixed maintenance schedules, thereby minimizing productivity loss while ensuring positioning accuracy.

The system introduces light emitting portions and light receiving portions as intermediary sensing elements that optically detect the position and orientation of the end effector relative to the substrate. These optical intermediaries convert physical position information into detectable light signals, enabling precise measurement of end effector state without requiring direct mechanical contact or complex sensor arrays. The light-based intermediary approach provides high measurement precision while maintaining relatively simple system architecture.