Substrate Transfer Calibration Using Orientation Error Feedback
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Solution Overview
Problem
Electronics processing systems face challenges in accurately transferring substrates between stations due to system errors, misalignments, and positional inaccuracies, leading to incorrect orientation and positioning of substrates at target stations.
Innovation Solution
A method and system for calibrating transfer sequences between stations using a calibration object, which determines characteristic error values to correct for misalignments and positional errors, ensuring accurate alignment and orientation of substrates by recording and applying these values to aligner stations and robot arms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If robot arms are used to transport substrates between stations, then substrate transfer is automated and productivity is improved, but system errors and positioning inaccuracies cause orientation and positioning errors
Solution Approach 1:
The patent applies preliminary action by performing calibration operations before actual substrate processing. A calibration object is transferred through the same robot arm sequence used for substrates, and characteristic error values are determined in advance. These pre-determined error values are then used to correct subsequent substrate transfers, eliminating the need for real-time correction and maintaining high productivity while improving precision.
Solution Approach 2:
The patent implements feedback by measuring the actual orientation and position of the calibration object at the destination station, comparing it to the target position, and using this information to determine characteristic error values. This feedback loop allows the system to learn and compensate for robot arm positioning errors, improving substrate placement accuracy without reducing automation.
2Manufacturing precision
If additional alignment operations are performed to correct positioning errors, then substrate orientation accuracy is improved, but system latency increases and efficiency decreases
Solution Approach 1:
The system performs alignment calibration in advance using a calibration object, determining characteristic error values before actual substrate processing begins. This preliminary alignment operation allows subsequent substrate transfers to use pre-calculated correction values, eliminating the need for time-consuming real-time alignment operations and reducing system latency.
Solution Approach 2:
The patent uses a calibration object as a copy or surrogate for the actual substrate during the calibration process. This calibration object undergoes the same transfer sequence as substrates, allowing the system to determine error values without processing actual substrates. The calibration data is then applied to substrate operations, achieving high precision without repeated alignment operations on real substrates.
3Manufacturing precision
If characteristic error values are determined and stored for each station, then positioning accuracy is improved, but device complexity and calibration procedures increase
Solution Approach 1:
The system performs self-calibration by automatically determining characteristic error values using a calibration object and fiducial markers. The calibration process is automated through the controller, which coordinates robot arm movements, measures positions, and calculates error values without requiring manual intervention. This self-service approach reduces operational complexity while maintaining high positioning accuracy.
Solution Approach 2:
The calibration object serves multiple functions: it acts as a positioning reference, contains fiducial markers for measurement, and enables determination of characteristic error values for multiple stations. This multi-functional calibration object simplifies the calibration system by consolidating multiple calibration requirements into a single object, reducing overall device complexity.
4Measurement precision
If fiducial markers are used to determine orientation, then measurement precision is improved, but the calibration object design and system setup become more complex
Solution Approach 1:
The fiducial markers on the calibration object utilize optical properties (such as reflective or absorptive characteristics) that enable precise detection by the measurement system. These markers are designed with specific optical signatures that make them easily distinguishable and measurable, improving orientation detection precision while maintaining relatively simple marker designs that can be manufactured and applied to the calibration object.
Data Source
AI summary
A calibration object is placed at a target orientation in a station of an electronics processing device by a first robot arm, and then retrieved from the station by the first robot arm. The calibration object is transferred to an aligner station using the first robot arm, a second robot arm and/or a load lock, wherein the calibration object has a first orientation at the aligner station. The first orientation at the aligner station is determined. A characteristic error value is determined based on the first orientation. The aligner station is to use the characteristic error value for alignment of objects to be placed in the first station.