Substrate Transfer Error Analysis via Image Data Extraction
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Solution Overview
Problem
Existing substrate processing apparatuses face inefficiencies in detecting and analyzing transfer errors, such as misalignment, drop, or breakage of substrates during transfer, due to the need to sift through large amounts of image data for error detection, which prolongs the analysis time and requires regular memory medium erasure.
Innovation Solution
A substrate processing apparatus equipped with a transfer part, detection part, recording part, and control parts that record substrate transfer operations as image data, accumulate relevant data, and convert it into files for efficient analysis, allowing for immediate identification of transfer errors and their causes by displaying detailed state information alongside transfer history and production information on dedicated screens.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If image data are continuously stored in the substrate processing apparatus, then transfer error detection capability is improved, but data analysis time increases and memory management becomes complex
Solution Approach 1:
The system performs preliminary actions by continuously recording image data during substrate transfer operations and pre-processing this data to extract only relevant portions when errors occur. This allows the system to have error detection capability ready in advance while avoiding the need to analyze entire continuous video streams when errors are detected, thus reducing analysis time.
Solution Approach 2:
The invention extracts only the necessary image data portions related to transfer errors from the continuously recorded data stream. When a transfer error is detected by the detection part, the system extracts and stores only the relevant image segments associated with that error, separating useful error analysis data from the large volume of normal operation data, thereby reducing analysis time and memory management complexity.
2Reliability
If image data are continuously stored in the substrate processing apparatus, then transfer error detection capability is improved, but memory medium requires regular erasure and maintenance
Solution Approach 1:
The system extracts and stores only relevant error-associated image data portions rather than continuously overwriting entire memory buffers. This selective extraction approach reduces the volume of data requiring management and eliminates the need for regular complete memory erasure, as only specific error-related segments are retained for analysis.
Solution Approach 2:
The system discards normal operation image data that does not contain transfer errors while recovering and retaining only the critical error-related portions. This selective data retention strategy reduces memory management overhead and eliminates routine maintenance erasure requirements, as the system naturally filters out unnecessary data.
3Measurement precision
If detailed state information of substrate is recorded, then error analysis accuracy is improved, but data processing complexity increases
Solution Approach 1:
The system extracts and records only the specific detailed state information relevant to transfer errors (such as substrate position, orientation, and condition at error moments) rather than continuously processing all possible data parameters. This selective extraction maintains high error analysis accuracy while reducing overall data processing complexity by focusing only on error-critical information.
Data Source
AI summary
Image data pertaining to substrate transfer is efficiently collected and stored for use in analyzing transfer errors. A substrate processing device includes a first control part for stopping a transfer part upon detecting a transfer error in the transfer part for transferring a substrate; a storage part for storing substrate transfer operations of the transfer part as image data; and a second control part for accumulating the image data in an accumulation part at a predetermined period. The first control part obtains information indicating a state of the substrate from the transfer part or a processing part, and notifies the second control part that the transfer part is stopped due to the transfer error. The second control part retrieves image data of a predetermined period of time including the time that the transfer error occurs from the accumulation part, and converts the image data into a file.