Substrate Transfer Robot Hand with Elastic Bellows
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Solution Overview
Problem
Existing substrate transfer systems face challenges in stabilizing the transfer operation of substrates with varying sizes and masses, as they often experience instability due to inadequate holding mechanisms, particularly when transferring substrates with large masses or thicknesses.
Innovation Solution
A substrate transfer robot equipped with a hand that incorporates adsorption, friction, and non-contact holding units, allowing for secure grip and stable transfer by adjusting the height position of adsorption units and utilizing friction and non-contact holding to enhance holding force and reduce gaps during transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single holding mechanism is used, then the device complexity is reduced, but the reliability of substrate holding deteriorates due to inadequate holding force for varying substrate masses and thicknesses
Solution Approach 1:
The patent combines three different holding mechanisms (adsorption holder, friction holder, and non-contact holder) into a single integrated hand assembly. The adsorption holder uses vacuum adsorption for primary holding, the friction holder provides supplemental friction-based holding, and the non-contact holder uses air bearing for gap reduction. This merging of multiple holding principles into one system ensures reliable substrate holding across varying masses and thicknesses without requiring separate handling devices for different substrate types.
Solution Approach 2:
The hand assembly is designed with multi-functional holding units that can adapt to different substrate characteristics. The adsorption holder, friction holder, and non-contact holder work together to provide universal holding capability for substrates of varying sizes, masses, and thicknesses. This universal design eliminates the need for multiple specialized holding devices while maintaining high reliability across diverse substrate types.
2Stability of the object's composition
If the adsorption holder is made rigid, then the structural strength is improved, but the ability to adapt to varying substrate positions and reduce gaps deteriorates
Solution Approach 1:
The adsorption holder is designed with elastic bellows that can dynamically expand and contract. This dynamic structure allows the holder to adapt its shape and size to match the substrate contours while maintaining structural stability. The elastic material provides both rigidity for stable holding and flexibility for adaptation, resolving the contradiction between structural strength and adaptability.
Solution Approach 2:
The adsorption holder utilizes elastic bellows made of flexible material that can deform to conform to the substrate surface. This flexible shell structure maintains structural integrity through its elastic properties while simultaneously adapting to varying substrate positions and shapes, enabling effective gap reduction and stable holding.
3Reliability
If the height position of the adsorption holder is lowered, then the gap between the holder and substrate is reduced improving holding stability, but the ease of operation deteriorates due to restricted access and positioning
Solution Approach 1:
The adsorption holder's height position is made dynamically adjustable through the elastic bellows mechanism. The holder can expand to a higher position for easy approach and positioning, then contract to a lower position for stable holding with minimal gap. This dynamic height adjustment maintains both ease of operation and holding stability throughout the transfer process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system stabilizes substrate transfer by ensuring secure grip and reduced gap formation between holding units and substrates, enabling reliable handling and transfer of substrates with varying dimensions and masses.
Implementation Method 1
an adsorption holder that holds a back surface of the substrate by adsorption
Implementation Method 2
a friction holder that holds the back surface by friction
Data Source
AI summary
A substrate transfer robot includes: a hand that supports a substrate; and an arm that operates the hand. The hand includes an adsorption holder that holds a back surface of the substrate by adsorption, and is stretchable to lower a height position of an upper end thereof, a friction holder that holds the back surface by friction in a state where the adsorption holder supporting the substrate contracts, and a non-contact holder that holds the back surface in a non-contact manner, in a state where the adsorption holder and the friction holder hold the back surface.