Substrate Transfer Hand Vibration Control via Exhaust Pressure Reduction
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Solution Overview
Problem
Existing substrate transfer robots experience instability and contamination due to the vibration of support rods during substrate transfer, leading to positional deviations and damage, as well as the production of particles that can contaminate the substrate.
Innovation Solution
The apparatus incorporates a support structure with guide rails for the support rods and a pressure reducing member in the exhaust fluid passage, which includes bent fluid passages and partitions to minimize air flow interference and particle contamination, ensuring stable hand support and reduced particle production.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single support rod is used to support the hand, then the device complexity is reduced, but the stability of the hand support deteriorates causing vibration and substrate position deviation
Solution Approach 1:
The single support rod is divided into multiple support rods (first support rod and second support rod). Each support rod is independently connected to the hand and guided by separate guide rails, distributing the support function across multiple elements to enhance stability while maintaining manageable complexity
Solution Approach 2:
Multiple support rods are combined to work together in supporting the hand. The first and second support rods are positioned to collectively support the hand structure, with their movements coordinated through the guide rail system to provide stable, vibration-reduced support
2Productivity
If support rods are moved during substrate transfer, then the substrate can be transferred between processing devices, but particles are produced that contaminate the substrate
Solution Approach 1:
The harmful particles generated by support rod movement are extracted and removed from the system using a separate exhaust fluid passage. The passage is positioned to capture particles at their source and transport them away from the substrate area through dedicated fluid flow paths
Solution Approach 2:
An exhaust fluid (gas or liquid) is introduced as an intermediary medium to carry particles away from the substrate. The fluid flows through the exhaust passage, capturing particles generated by support rod movement and transporting them to a removal point without allowing particles to contaminate the substrate
3Object-generated harmful factors
If multiple fluid passages are combined in the exhaust system, then the particle removal efficiency is improved, but the device complexity increases
Solution Approach 1:
Multiple fluid passages (first fluid passage and second fluid passage) are merged into a combined exhaust passage. The passages are positioned to capture particles from different locations (side surface and top surface directions) and are combined to transport all captured particles through a single common path to the exhaust outlet, improving particle removal efficiency while managing system complexity
Data Source
AI summary
An apparatus for transferring a substrate is provided. A unit for transferring a substrate, includes a support structure, a first hand to place the substrate, a second hand stacked with the first hand and placing the substrate, a first guide rail guiding movement of a first support rod to support the first hand in the support structure, a second guide rail guiding movement of a second support rod in the support structure to support the second hand, and a pressure reducing member reducing pressure of an exhaust fluid passage provided in the support structure. The exhaust fluid passage includes a first fluid passage communicating with the first guide rail, a second fluid passage communicating with the second guide rail, and a third fluid passage formed by combining the first fluid passage with the second fluid passage. The pressure reducing member reduces pressure of the third fluid passage.