Substrate Transfer Mapping for Accurate Height Position Correction

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Solution Overview

Problem

Existing transfer devices face challenges in accurately detecting and correcting the height positions of substrates in accommodation containers, leading to potential errors in substrate handling and processing.

Innovation Solution

A method involving a mapping sensor to detect height positions of reference and production substrates, setting reference positions, and correcting these positions based on accumulated mapping data to ensure accurate substrate handling and processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If height positions of substrates are detected using a mapping sensor, then substrate position information is obtained, but errors in detected height positions may lead to inaccurate substrate handling

Engineering Contradiction:

Improveheight position detection accuracyVSAvoidsubstrate handling accuracy

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The system detects height positions of substrates in multiple accommodation containers using a mapping sensor, stores this information, and then corrects reference positions based on the detected data. This feedback mechanism allows the system to identify and compensate for detection errors, thereby improving substrate handling accuracy while maintaining efficient height position measurement

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The system performs preliminary detection of height positions in reference accommodation containers to establish reference position information before actual substrate processing. By pre-establishing accurate reference positions through preliminary mapping and correction, the system ensures reliable substrate handling during production without requiring repeated corrections

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances the accuracy of substrate handling by reducing errors in substrate transfer and processing, thereby improving the efficiency and reliability of the transfer system.

Implementation Method 1

detecting, in a reference accommodation container in which reference substrates are accommodated, height positions of the reference substrates using the mapping sensor

Methodology Applied

Scientific EffectOptical detection: Light

Data Source

PatentUS12466666B2Method of teaching transfer device, and transfer system

Publication Date: 2025.11.11 TOKYO ELECTRON LTD

AI summary

A method of teaching a transfer device provided with a pick configured to hold a substrate and a mapping sensor, includes: detecting, in a reference accommodation container in which reference substrates are accommodated, height positions of the reference substrates using the mapping sensor and setting a reference position in a height direction; detecting, in a plurality of accommodation containers in which production substrates to be processed in a substrate processing apparatus are accommodated, height positions of the production substrates using the mapping sensor and storing information about the height positions; and correcting the reference position based on the stored information in the plurality of accommodation containers.