Substrate Transfer Scheduling for Reduced Treatment Unit Idle Time
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Solution Overview
Problem
The existing substrate treatment apparatuses face inefficiencies in throughput due to long periods of treatment unit inactivity, primarily caused by suboptimal transfer schedule decision methods that lead to delayed treatments and prolonged idle times.
Innovation Solution
A substrate treatment apparatus equipped with a controller that determines the possibility of preceding execution of treatments on a new substrate before the completion of similar treatments on a preceding substrate, optimizing the transfer schedule by adjusting standby times and routes to minimize idle periods and enhance throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the transfer robot delays the first circulation transfer of a following substrate to ensure the minimum standby cycle, then the treatment unit has sufficient time to complete the preceding substrate treatment, but the throughput is reduced due to longer idle periods
Solution Approach 1:
The controller performs preliminary calculation of the standby cycle and determines the optimal timing for the first circulation transfer before the actual transfer occurs. By predicting whether the standby cycle will be sufficient in advance, the system can avoid unnecessary delays while ensuring treatment completion, thus resolving the contradiction between reliability and productivity
Solution Approach 2:
The system dynamically adjusts the timing of the first circulation transfer based on real-time calculation of the standby cycle. Instead of using a fixed delay, the controller flexibly determines the optimal transfer timing by comparing the calculated minimum standby cycle with the standard standby cycle, allowing the system to adapt to different treatment durations and maximize throughput while ensuring reliability
2Manufacturing precision
If the controller calculates and enforces a minimum standby cycle for treatment units, then treatment quality is ensured by preventing premature transfers, but the treatment unit experiences prolonged idle time reducing overall efficiency
Solution Approach 1:
The controller minimizes idle time by precisely calculating the standby cycle and scheduling the first circulation transfer to occur at the optimal moment when the treatment unit becomes available. This ensures continuous utilization of the treatment unit without premature transfers that would compromise quality, while avoiding unnecessary idle periods, thus maintaining both treatment quality and efficiency
Solution Approach 2:
The system changes the timing parameter of the first circulation transfer dynamically based on the calculated standby cycle. By adjusting this parameter according to actual treatment duration rather than using a conservative fixed value, the system reduces idle time while ensuring treatment quality is maintained through appropriate standby periods
Data Source
AI summary
A substrate treatment apparatus includes: treatment parts each of which performs a predetermined treatment; and a transfer mechanism which transfers a transfer object. Transfer objects are transferred in a predetermined transfer-in order into the substrate treatment apparatus. The substrate treatment apparatus includes a controller which acquires a process job. The controller determines before starting transfer of one transfer object to the treatment part, when the process job is different between the one transfer object and a preceding transfer object transferred into the substrate treatment apparatus prior to the one transfer object and a same kind of treatment is included in the respective process jobs thereof, a possibility of performing preceding execution of executing the same kind of treatment on the one transfer object previous to completion of the same kind of treatment on the preceding transfer object.