Substrate Transfer Heating to Prevent IPA Stains in CO2 Drying
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Solution Overview
Problem
When using isopropyl alcohol (IPA) as an organic solvent in substrate treatment with supercritical carbon dioxide, the high temperature required to increase reactivity between IPA and CO2 can cause IPA to evaporate during supply, leading to stains on the substrate.
Innovation Solution
A substrate treating apparatus and method that involves heating the IPA on the substrate to a temperature below its boiling point before transferring it to a drying chamber where supercritical CO2 is used for drying, thereby preventing evaporation and stains.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high temperature is applied to increase reactivity between IPA and CO2, then the cleaning effectiveness is improved, but IPA evaporates during supply causing stains on the substrate
Solution Approach 1:
The substrate is pre-heated to a specific temperature range (50-100°C) before the IPA supply process begins. This preliminary heating ensures that when IPA is supplied, it maintains adequate reactivity with CO2 for effective cleaning without requiring excessive temperature that would cause evaporation and staining.
Solution Approach 2:
The invention optimizes the temperature parameter within a specific range (50-100°C) to balance two competing requirements: maintaining sufficient reactivity between IPA and CO2 for effective cleaning while preventing IPA evaporation that causes stains. This parameter optimization resolves the contradiction by finding the optimal operating point.
2Productivity
If high temperature is used to enhance IPA-CO2 reactivity, then the drying efficiency is improved, but the IPA evaporates and leaves stains
Solution Approach 1:
The substrate is pre-heated to the optimal temperature range (50-100°C) before IPA supply, ensuring that the drying process can proceed efficiently with enhanced reactivity while maintaining substrate surface quality by preventing evaporation-induced stains.
Solution Approach 2:
By optimizing the temperature parameter within the 50-100°C range, the invention achieves both high drying efficiency through enhanced IPA-CO2 reactivity and maintains manufacturing precision by preventing substrate surface staining from evaporation.
3Reliability
If temperature is increased to improve chemical treatment effectiveness, then foreign substance removal is enhanced, but energy consumption increases and evaporation occurs
Solution Approach 1:
The invention optimizes the temperature parameter to a moderate range (50-100°C) that provides sufficient reactivity for effective foreign substance removal while minimizing energy consumption and preventing evaporation losses, thereby resolving the contradiction between treatment effectiveness and energy efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for efficient removal of IPA using supercritical CO2 without causing evaporation or stains on the substrate, facilitating easier processing and reducing waste dispersion.
Implementation Method 1
a heating member for heating the substrate, and wherein the controller controls the transfer device such that the heating member of the transfer device heats a liquid on the substrate to a first temperature before the transfer device transfers the substrate taken out from the liquid treating chamber to the drying chamber
Implementation Method 2
the supercritical fluid is supplied to the top surface of the substrate in a high-pressure chamber to dissolve and remove the organic solvent remaining on the substrate
Implementation Method 3
the pure water on the substrate is replaced with an organic solvent, and the supercritical fluid is supplied to the top surface of the substrate in a high-pressure chamber to dissolve and remove the organic solvent remaining on the substrate
Data Source
AI summary
A substrate treating device includes a liquid treating chamber for liquid-treating a substrate therein, a drying chamber for dry-treating the liquid-treated substrate, a transfer device for transferring the substrate between the liquid treating chamber and the drying chamber, and a controller for controlling the liquid treating chamber and the transfer device. The transfer device includes a transfer robot having a hand for placing the substrate thereon, and a heating member for heating the substrate. The controller controls the transfer device such that the heating member of the transfer device heats a liquid on the substrate to a first temperature before the transfer device transfers the substrate taken out from the liquid treating chamber to the drying chamber.