Substrate Transfer Laser Measurement Cable Elimination
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing substrate transfer devices face challenges in managing cables within the chamber, particularly as the moving distance of the table increases, leading to complex cable treatment requirements.
Innovation Solution
A substrate transfer device that employs a laser measuring instrument through an optical window and a pipe to measure the table's position without the need for cables within the transfer space, using a pipe with corrugations, porous surfaces, or varying diameters to reduce gas molecule adherence to the optical window, and an inert gas supply to further minimize gas flow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a cable is used to transmit position signals from the sensor to outside the chamber, then the position measurement function is achieved, but cable treatment becomes complex and difficult as the moving distance increases
Solution Approach 1:
The patent extracts the cable from the transfer space by moving the sensor outside the chamber and connecting it through a cable passage. This eliminates the complexity of cable treatment within the transfer space while maintaining position measurement functionality.
Solution Approach 2:
The patent introduces a cable passage as an intermediary structure that allows the cable to extend from the sensor to outside the chamber without interfering with the transfer space environment. This mediator resolves the conflict between signal transmission and clean chamber design.
2Reliability
If the transfer space is sealed to maintain vacuum, then the chamber environment is maintained, but gas molecules can still adhere to the optical window
Solution Approach 1:
The patent applies a porous coating on the optical window surface that allows gas molecules to be absorbed into the porous structure rather than adhering to the surface. This maintains the sealed chamber environment while preventing harmful gas molecule accumulation on the optical window.
Solution Approach 2:
The patent introduces inert gas into the transfer space to displace reactive gas molecules that would otherwise adhere to the optical window. This creates an inert environment that prevents unwanted chemical interactions while maintaining the sealed chamber.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution eliminates the need for cable treatment within the transfer space, reducing the probability of gas molecules adhering to the optical window and enhancing the overall operational efficiency by maintaining a sealed environment.
Implementation Method 1
The laser measuring instrument measures a position of the table by irradiating laser light toward the table through the optical window and receiving reflected light coming from the table
Implementation Method 2
The laser measuring instrument measures a position of the table by irradiating laser light toward the table through the optical window and receiving reflected light coming from the table
Implementation Method 3
the pipe can reduce the conductance in a route between the transfer space and the optical window. As a result, it is possible to reduce the probability that gas molecules existing within the transfer space adhere to the optical window
Implementation Method 4
at least a portion of an inner surface defining the bore of the pipe may have corrugations. The corrugations may be corrugation of 0.1 mm to 3 mm. Gas molecules can be captured by the inner surface of the pipe
Data Source
AI summary
In one embodiment, a substrate transfer device is equipped with a chamber wall, a table, a linear motor transfer mechanism, an optical window, and a laser measuring instrument. The chamber wall defines a transfer space. The table is housed within the transfer space. It is possible for a substrate to be loaded on the table. The linear motor transfer mechanism moves the table within the transfer space, by a linear motor. The optical window is installed between the transfer space and the space to the outside of the transfer space. For example, the optical window is disposed so as to seal off an opening defined in the chamber wall. The laser measuring instrument irradiates a laser light through the optical window and towards the table, receives reflected light from the table, and measures the position of the table.