Substrate Transfer Robot Arm With Laser Vision Collision Detection
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Solution Overview
Problem
Existing substrate transfer technologies face challenges in collision prevention due to software-based collision prevention systems, poor speed and reliability in analyzing front objects through camera images, and the inability to recognize obstacles outside the light-emitted area, leading to potential substrate damage and facility shutdowns.
Innovation Solution
A substrate transfer assembly equipped with a robot arm, a laser for emitting light, an image sensor for capturing images, and a control circuit that divides the image into areas to determine collision risks, allowing for stable and reliable collision prevention by emitting light in a diagonal direction and analyzing the entire front area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of stationary object
If software-based collision prevention is used, then the system can operate continuously, but the reliability decreases when teaching data or substrate transfer information has problems
Solution Approach 1:
The patent introduces a camera as an intermediary device to detect obstacles in the substrate transfer path. The camera captures images of the transfer path, and the control unit analyzes these images to identify obstacles, providing an independent verification mechanism that does not rely solely on software-based collision prevention or teaching data.
2Measurement precision
If camera-based obstacle detection is used, then the system can detect front objects, but the speed and reliability are poor due to requiring analysis of all objects in the picture
Solution Approach 1:
The patent divides the captured image into multiple regions corresponding to different spatial zones in the substrate transfer path. The control unit analyzes each region separately to identify obstacles, which reduces the computational complexity compared to analyzing the entire image at once, thereby improving detection speed while maintaining accuracy.
Solution Approach 2:
The patent applies different analysis strategies to different regions of the image based on their importance. Regions closer to the substrate transfer path receive more detailed analysis, while less critical regions are analyzed more quickly or with lower resolution, optimizing the balance between detection accuracy and processing speed.
3Measurement precision
If light is emitted to determine collision risk, then the system can detect obstacles, but it cannot grasp obstacles outside the light-emitted area
Solution Approach 1:
The patent positions the camera at an angled position relative to the substrate transfer path, allowing it to capture a wider field of view that extends beyond the direct light path. This angular positioning enables the system to detect obstacles in areas that would not be visible if the camera were positioned directly in line with the light emission, effectively expanding the detection coverage area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables stable and reliable collision prevention with front objects, addressing the limitations of previous technologies by recognizing all obstacles within the light-emitted area and providing quick responses to potential collisions, thus preventing substrate damage and ensuring continuous facility operation.
Implementation Method 1
a laser disposed at a first region of the robot arm, and emits a ray of light in a diagonal direction of a forward movement path of the substrate support
Implementation Method 2
an image sensor disposed at the robot arm and generating a photographed picture or video including an image of a front object by the one or more emitted rays of light
Implementation Method 3
an image sensor disposed at the robot arm and generating a photographed picture or video including an image of a front object by the one or more emitted rays of light
Data Source
AI summary
A substrate transfer assembly that transfers a substrate includes a robot arm configured to transfer the substrate, a laser disposed at the robot arm and emitting one or more rays of light, an image sensor disposed at the robot arm and generating a photographed picture or video including an image of a front object by the one or more emitted rays of light, and a control circuit configured to control transfer of the substrate based on the image present in the photographed picture or video.