Substrate Transfer Scheduling With Dynamic Margin Time Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate processing systems fail to account for variations in process end times, leading to excessive leaving times in processing modules due to transfer disturbances, which can exceed predefined limits.
Innovation Solution
An apparatus and method for generating a transfer schedule that includes a margin time calculated using actual processing times and sensor feedback to adjust the schedule dynamically, ensuring that substrates are processed within predefined limits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a substrate transfer schedule is generated in advance based on a plating process time specified in a recipe, then the substrate transfer schedule can be determined beforehand, but the leaving time after processing may exceed a limit value when the actual required time varies
Solution Approach 1:
The transfer schedule is dynamically adjusted based on actual process end times and estimated leaving times. When the estimated leaving time exceeds the limit value, the schedule is automatically rescheduled to delay the transfer timing, ensuring the leaving time constraint is satisfied while maintaining efficient substrate processing
Solution Approach 2:
The system continuously monitors actual process end times and uses this feedback to update the transfer schedule. By comparing actual process completion with the scheduled transfer time, the system estimates the leaving time and adjusts subsequent transfer timings to prevent exceeding the limit value, creating a closed-loop control system
2Reliability
If the transfer schedule is adjusted frequently to accommodate variations in actual process end times, then the leaving time limit can be maintained, but the complexity of schedule management increases
Solution Approach 1:
The transfer schedule automatically adjusts itself based on actual process end times without requiring external intervention. The system autonomously estimates leaving times, identifies when limits would be exceeded, and reschedules transfers accordingly, reducing the need for complex manual schedule management while ensuring compliance
3Reliability
If the process time in the recipe is increased to account for variations, then the leaving time limit is more likely to be satisfied, but the overall processing time increases
Solution Approach 1:
Instead of increasing the fixed process time in the recipe, the system changes the transfer schedule parameters dynamically. By adjusting the transfer timing based on actual process end times and estimated leaving times, the system maintains the original process time specifications while ensuring leaving time constraints are met, avoiding unnecessary delays
Data Source
AI summary
An apparatus for processing a substrate is configured to generate a transfer schedule by adding a positive or negative margin time to a processing time of a first process set in a recipe, wherein the margin time is calculated by a learning network or a statistical calculation method using actually measured processing times obtained by actually performing the first process with regard to a plurality of substrates in a first processing tank. In addition to or in place of this configuration, the apparatus may be configured to estimate an estimated process end time from a detection value obtained from a sensor, and when it is determined that the estimated process end time is behind a scheduled transfer start time, to correct the scheduled transfer start time to the estimated process end time and adjust the transfer schedule in accordance with the corrected scheduled transfer start time.