Substrate Transfer Mechanism for Asynchronous Robot Hand Exchange
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Solution Overview
Problem
The existing substrate transport systems in semiconductor production processes are hindered by the need for synchronization between main transport robots and indexer robots, leading to increased transfer times and reduced efficiency due to the time required for hand advancement, retraction, and movement.
Innovation Solution
A substrate transport apparatus featuring a substrate transfer mechanism with vertically arranged upper and lower hands that performs hand opening and closing operations to facilitate simultaneous substrate exchange between robots, reducing the time needed for transfer and allowing asynchronous operation of the robots.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the main transport robot and indexer robot use a double arm type with vertically arranged upper and lower hands for substrate transfer, then the substrate transfer mechanism can accommodate multiple substrates, but the time required for hand advancement, retraction, and movement increases, reducing substrate transport speed
Solution Approach 1:
The substrate transfer mechanism is divided into independent upper and lower hands that can operate separately. Each hand can advance, retract, and move vertically independently, allowing parallel operations that reduce total transfer time while maintaining the capability to handle multiple substrates simultaneously.
Solution Approach 2:
The hands are positioned and prepared in advance at optimal locations. The upper and lower hands can pre-position substrates before the actual transfer operation begins, reducing the time required during the critical transfer phase and increasing overall transport speed.
2Manufacturing precision
If the main transport robot and indexer robot operate with synchronized hand movements for substrate transfer, then transfer precision can be maintained, but the robots are constrained for longer periods and substrate transport time increases
Solution Approach 1:
A dedicated substrate transfer mechanism acts as an intermediary between the main transport robot and indexer robot. This intermediary handles the precise positioning and transfer operations, allowing the robots themselves to operate asynchronously without compromising transfer precision. The transfer mechanism absorbs the timing differences between the two robots.
Solution Approach 2:
The transfer mechanism employs dynamic, independently controllable hands that can adjust their movements in real-time. This dynamic control allows precise substrate transfer even when the robots operate at different speeds or timing, eliminating the need for rigid synchronization while maintaining accuracy.
3Reliability
If the upper and lower hands move vertically for substrate exchange between robots, then complete substrate transfer is achieved, but the transfer process requires more time and reduces productivity
Solution Approach 1:
The vertical movement of upper and lower hands is combined with horizontal advancement and retraction movements into a coordinated single operation. Instead of performing vertical movement as a separate step after horizontal transfer, the system merges these movements to achieve substrate exchange more efficiently while ensuring complete transfer.
Solution Approach 2:
The hands maintain continuous useful action throughout the transfer process. While one hand is transferring a substrate, the other hand is already positioned or moving to receive the next substrate, eliminating idle time and ensuring that the transfer operation continues without interruption, thereby improving productivity while maintaining reliability.
Data Source
AI summary
A substrate transport apparatus includes a first substrate transport robot, a second substrate transport robot and a substrate transfer mechanism. The first substrate transport robot includes an upper hand and a lower hand vertically arranged. The second substrate transport robot includes an upper hand and a lower hand vertically arranged. The substrate transfer mechanism includes an upper hand and a lower hand vertically arranged and a hand driving mechanism adapted to perform hand opening and closing operations to vertically move the upper and lower hands.