Substrate Transfer Path Layout for Compact Footprint
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses have a large footprint due to the arrangement of transfer mechanisms, which increases the occupied area and hinders efficient substrate processing.
Innovation Solution
The apparatus is designed with a transfer path on the lateral side of the processing portion, featuring a first transfer robot for substrate transfer between a holding unit and a processing unit, and a second transfer robot for transfer between the processing unit and a delivery region, with a second transfer robot raising/lowering unit positioned within the transfer path to shorten the necessary length of the transfer path, allowing for a reduced footprint and enhanced transfer efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the raising/lowering drive mechanism is arranged on the side opposite to the indexer robot with respect to the main transfer robot, then the mechanism can operate independently, but the transfer path length increases and the footprint of the apparatus increases
Solution Approach 1:
The patent repositions the raising/lowering drive mechanism from a linear arrangement (opposite side of the indexer robot) to a spatial arrangement within the transfer path. This dimensional reconfiguration allows the mechanism to occupy vertical or lateral space within the existing transfer path volume rather than extending the linear footprint, thereby reducing the apparatus's occupied area while maintaining operational independence.
2Device complexity
If the transfer path is extended linearly from the indexer robot, then the substrate transfer sequence is simplified, but the necessary length of the transfer path increases
Solution Approach 1:
The patent implements a nested arrangement where the reception/delivery region and raising/lowering mechanism are positioned within the transfer path rather than sequentially along it. This nesting allows multiple functional elements to occupy the same spatial envelope, effectively shortening the linear transfer path length while preserving the simplified transfer sequence through proper spatial organization of components.
Data Source
AI summary
A transfer path is provided which is extended so as to be passed on a lateral side of a processing portion that processes a substrate. The substrate transferred between a container held by a holding unit and the processing portion passes through the transfer path. A first transfer robot carries the substrate into and out of the container held by the holding unit, and accesses a reception/delivery region arranged within the transfer path. A second transfer robot receives and delivers the substrate from and to the first transfer robot in the reception/delivery region, and carries the substrate into and out of the processing portion. A second transfer robot raising/lowering unit which raises and lowers the second transfer robot is arranged within the transfer path. The reception/delivery region and the second transfer robot raising/lowering unit are located between the first transfer robot and the second transfer robot.