Substrate Transfer Position Sensing in Reduced-Pressure Handling
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Solution Overview
Problem
Conventional substrate transfer apparatuses in reduced pressure atmospheres can only measure the substrate's position when it passes through a connective hole, limiting continuous monitoring and increasing the risk of transfer failures.
Innovation Solution
A substrate transfer apparatus equipped with a substrate holder and a substrate measurer that continuously measures the substrate's position using CMOS line sensors or other distance-measuring technologies integrated into the transfer arm, allowing for real-time monitoring and accurate positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a sensor is disposed at the connective hole to detect substrate position, then the substrate position can be detected at the connective hole, but continuous monitoring of substrate position during transfer is not possible
Solution Approach 1:
The substrate transfer apparatus is divided into multiple measurement zones: a first substrate measurer (camera) positioned at the connective hole for detection during transfer, and a second substrate measurer positioned at the substrate processing apparatus for detection upon arrival. This segmentation allows continuous monitoring at different stages of the transfer process, reducing the risk of undetected position errors.
Solution Approach 2:
A first substrate measurer (camera) is introduced as an intermediary detection device positioned at the connective hole to capture substrate position images during transfer. This intermediary measurement system works in conjunction with the existing sensor at the substrate processing apparatus, providing additional monitoring points without interfering with the normal transfer operation.
2Device complexity
If substrate position is only measured at the connective hole, then the measurement system is simple, but the likelihood of transfer failures increases
Solution Approach 1:
The measurement system is segmented into multiple independent measurement points: the first substrate measurer at the connective hole and the second substrate measurer at the substrate processing apparatus. Each measurer independently monitors substrate position at its location, providing redundant detection without requiring a single complex measurement system.
Solution Approach 2:
The measurement function continues throughout the substrate transfer process by using multiple measurers at different positions. The first measurer monitors during transfer through the connective hole, and the second measurer monitors upon arrival at the substrate processing apparatus, ensuring continuous monitoring rather than intermittent measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous monitoring and accurate positioning of substrates during transfer, reducing the likelihood of transfer failures and ensuring precise placement in both atmospheric and reduced pressure environments.
Implementation Method 1
a substrate measurer, provided on the substrate holder, to measure a position of the substrate with respect to the substrate holder
Data Source
AI summary
The present disclosure relates to a substrate transfer apparatus for transferring a substrate to a substrate processing apparatus in a reduced pressure atmosphere. The apparatus comprises a substrate holder to hold the substrate; and a substrate measurer, provided on the substrate holder, to measure a position of the substrate with respect to the substrate holder.