Substrate Transfer Speed Control for Uniform Queue Time
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Solution Overview
Problem
Conventional substrate processing systems lack efficient control over queue times, leading to variations in processing times, decreased substrate quality, increased material waste, and reduced yield.
Innovation Solution
A method is introduced to determine a predetermined queue time associated with a process recipe, which is used to control the speed of components in a substrate processing system, ensuring substrates remain in processing chambers for a uniform amount of time after processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional substrate processing systems operate without queue time control, then processing speed may be maintained, but substrate quality deteriorates due to time variations
Solution Approach 1:
The system dynamically adjusts the queue time parameter based on real-time processing conditions. By monitoring actual processing times and modifying the queue time accordingly, the system maintains consistent substrate quality while adapting to variations in processing speed, thereby resolving the contradiction between quality precision and time loss.
Solution Approach 2:
The patent implements a feedback mechanism where substrate processing time data is continuously collected and used to adjust queue time settings. This closed-loop control ensures that substrate quality remains high by compensating for time variations through real-time parameter adjustments, effectively resolving the contradiction between maintaining quality and minimizing time loss.
2Productivity
If substrates are processed with varying queue times, then system throughput may be increased, but material waste increases due to non-uniform processing
Solution Approach 1:
The system optimizes the queue time parameter to balance throughput and material utilization. By adjusting queue time based on processing conditions, the system maintains high productivity while ensuring uniform substrate processing, which prevents material waste and resolves the contradiction between productivity and substance loss.
3Adaptability or versatility
If queue time is not controlled uniformly, then processing flexibility is maintained, but yield decreases due to substrate variations
Solution Approach 1:
The system dynamically adjusts queue time parameters based on real-time processing conditions while maintaining a standardized control approach. This allows the system to adapt to different processing scenarios and maintain flexibility, while simultaneously ensuring uniform substrate treatment that improves yield and resolves the contradiction between adaptability and reliability.
Data Source
AI summary
A method includes determining a predetermined queue time associated with a process recipe. The predetermined queue time is associated with an amount of time a substrate is at a location prior to being moved from the location. The method further includes causing control of speed associated with one or more components of a substrate processing system based on the predetermined queue time. The control of speed is associated with transfer of the substrate.