Substrate Transfer Robot Vertical Arm Rotation
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Solution Overview
Problem
Existing substrate transfer systems face challenges in efficiently transferring substrates between storage and processing apparatuses, particularly in accommodating substrates at varying height positions and minimizing the robot installment area to prevent contamination and ensure miniaturization.
Innovation Solution
A substrate transfer robot with a base, hand, and rotatable arms that move in a height direction to access substrates at both lowest and highest positions, with a configuration that allows the arm to rotate partially into an opening between the storage and processing apparatuses, enabling efficient transfer while minimizing the robot installment area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the robot installment area is minimized to prevent contamination and ensure miniaturization, then the clean environment is improved, but the robot's ability to access substrates at varying height positions becomes constrained
Solution Approach 1:
The robot arm is configured to rotate not only horizontally but also vertically, utilizing the third dimension (height) to access substrates at different height positions. The opening in the processing apparatus provides vertical clearance that allows the arm to rotate partially inside the processing apparatus, enabling access to both lowest and highest substrate positions without increasing the horizontal footprint of the robot installment area.
2Adaptability or versatility
If the robot arm rotates partially into the opening to access substrates at highest and lowest positions, then the adaptability to access all height positions is improved, but the risk of contacting the processing apparatus and causing contamination increases
Solution Approach 1:
The opening in the processing apparatus is strategically positioned and sized to provide just enough vertical clearance for the robot arm to rotate partially inside the processing apparatus. This localized structural feature enables the arm to access substrates at extreme height positions while the surrounding walls of the processing apparatus prevent lateral contact, thus allowing adaptability without increasing contamination risk.
3Area of stationary object
If the robot installment area is reduced for miniaturization, then the system size is improved, but the robot's movement range to transfer substrates between extreme height positions becomes constrained
Solution Approach 1:
Instead of increasing the horizontal movement range of the robot arm, the system utilizes vertical movement by allowing the arm to rotate partially inside the processing apparatus through the opening. This three-dimensional rotation path enables the hand to reach substrates at both lowest and highest positions without requiring a larger horizontal installment area, thus achieving miniaturization while maintaining adequate movement range.
Data Source
AI summary
A substrate transfer robot is disposed in a robot installment area defined between a first apparatus and a second apparatus including an opening. The first apparatus includes a first wall, the second apparatus including a second wall. The first apparatus accommodates the substrate at each of a lowest height position and a highest height position. The substrate transfer robot includes a base stationary, a hand configured, and an arm. The arm is rotatably mounted to the base to move the hand. The hand and the arm move in a height direction between a movable range defined between a lowest position and a highest position. The arm rotates with partially entering the opening when the substrate transfer robot takes out the substrate from the first apparatus. The substrate is accommodated at each of the lowest height position and the highest height position.