Substrate Transfer Interface with In-Process Robot Charging
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Solution Overview
Problem
Existing substrate transfer systems in semiconductor manufacturing require separate charging stations for mobile robots, disrupting the transfer process and reducing efficiency.
Innovation Solution
A substrate transfer system with a mobile robot and interface device that includes a power feeder for wireless charging, using actuators and identification tags to align and charge the robot during substrate transfer, optimizing the charging process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a separate charging station is used for mobile robots, then the robot can be charged, but the substrate transfer process is disrupted and efficiency is reduced
Solution Approach 1:
The charging function is merged with the substrate transfer interface device. The power feeder is integrated into the interface device that handles substrate carriers, allowing the mobile robot to be charged simultaneously when transferring substrates, eliminating the need for separate charging stations and avoiding disruption to the transfer process
Solution Approach 2:
The charging operation continues concurrently with the substrate transfer operation. The mobile robot remains connected to the power feeder during the entire substrate carrier transfer process, ensuring continuous power supply without interrupting the manufacturing workflow
2Adaptability or versatility
If the power feeder and power receiver are positioned far apart, then the charging range is larger, but the charging efficiency decreases
Solution Approach 1:
The system uses identification tags and tag readers to detect the mobile robot's position and the power receiver's location. The controller adjusts the power feeder's position based on this feedback information, optimizing the distance between the power feeder and power receiver to maintain high charging efficiency while adapting to different robot positions
Solution Approach 2:
The power feeder is made movable through an actuator system that adjusts its position dynamically. This allows the power feeder to adapt its distance from the power receiver based on real-time positioning requirements, combining the benefits of flexible positioning with optimized charging efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances manufacturing efficiency by allowing continuous substrate transfer and battery charging without the need for additional charging stations, improving convenience and rapidity.
Implementation Method 1
a power feeder configured to supply an electromotive force to the power receiver of the mobile robot
Data Source
AI summary
Methods of transferring a substrate during a semiconductor device fabrication process include receiving the substrate at a mobile robot, moving the mobile robot with the substrate, and aligning the mobile robot with a mobile robot interface device, transferring the substrate from the mobile robot to the mobile robot interface device, and while transferring the substrate from the mobile robot to the mobile robot interface device, charging a battery of the mobile robot.