Substrate Transfer Robot Edge Position Teaching
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Solution Overview
Problem
Conventional substrate transfer robots require time-consuming processes to specify the vertical position of a substrate, which limits the thickness of teaching jigs and makes it difficult to apply these jigs on actual substrates for edge position teaching.
Innovation Solution
A method and system for teaching the edge position of a plate-shaped target body to a substrate transfer robot using a photoelectric sensor, where the optical axis moves to an initial position outside the edge, repeats a series of movements to detect the edge, and stores the position based on the robot's posture, eliminating the need to specify the vertical position beforehand.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the vertical position of the substrate is specified beforehand using a transmission-type sensor, then the edge position can be detected, but the processing time increases significantly and the teaching jig requires considerable thickness
Solution Approach 1:
The detection process is segmented into two independent stages: (1) detecting the top surface position by moving the optical axis along the Z-axis, and (2) detecting the edge position by moving the optical axis in the XY-plane. This segmentation allows the system to detect edge positions without requiring the time-consuming preliminary step of specifying vertical position, thereby reducing processing time while maintaining detection accuracy.
Solution Approach 2:
The invention changes the detection approach by detecting the top surface position first (Z-dimension) and then using that information to detect the edge position (XY-dimension) independently, rather than requiring complete vertical position specification before edge detection. This dimensional separation eliminates the time-consuming prerequisite of specifying vertical position for edge detection.
2Measurement precision
If a teaching jig with considerable thickness is used to specify the vertical position of the substrate, then the edge position can be detected, but it becomes difficult to apply the teaching jig on actual substrates
Solution Approach 1:
The detection process is segmented into two independent stages: (1) detecting the top surface position by moving the optical axis along the Z-axis, and (2) detecting the edge position by moving the optical axis in the XY-plane. This segmentation allows the system to detect edge positions without requiring the time-consuming preliminary step of specifying vertical position, thereby reducing processing time while maintaining detection accuracy.
Solution Approach 2:
The invention uses the top surface of the substrate itself (or a thin teaching jig copying the substrate) as the reference for detection, rather than requiring a thick teaching jig. By detecting the top surface position first and then using that information for edge detection, the system can work with actual substrates or thin teaching jigs, greatly improving adaptability and versatility.
3Measurement precision
If the optical axis is moved in the XY-plane to detect the edge position, then the edge position can be specified, but the vertical position must be specified in a previous stage which increases processing time
Solution Approach 1:
The detection process is segmented into two independent stages: (1) detecting the top surface position by moving the optical axis along the Z-axis, and (2) detecting the edge position by moving the optical axis in the XY-plane. This segmentation allows the system to detect edge positions without requiring the time-consuming preliminary step of specifying vertical position, thereby reducing processing time while maintaining detection accuracy.
Solution Approach 2:
The invention performs a preliminary detection of the top surface position (Z-axis) before edge position detection (XY-plane). This preliminary action provides the necessary reference information for subsequent edge detection, simplifying the overall process by establishing a clear sequence of operations rather than requiring complex simultaneous specifications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach shortens processing time and allows for teaching the edge position regardless of substrate thickness, as vertical and horizontal positions are detected simultaneously, without the need for a thick teaching jig.
Implementation Method 1
a photoelectric sensor provided at a distal end portion of the hand... the optical axis moves to an initial position outside the edge... repeats a series of movements to detect the edge
Data Source
AI summary
A method of teaching the target body edge position includes moving a photoelectric sensor optical axis to an initial position specified on the target body edge outer side installed so that the target body main surface is horizontal, and specified upper or lower than the target body, repeating an optical axis forward cycle until the target body edge is detected by the sensor, and obtaining the target body edge detected point position based on the substrate transfer robot posture when the target body edge is detected by the sensor to store the edge position. A movement cycle includes a series of movements including lifting or lowering passing through a height level of the target body, forward movement by a first movement amount in a horizontal scanning direction toward the target body, lowering or lifting passing through the level, and forward movement by the first movement amount in the scanning direction.