Substrate Transfer Robots for Processing Apparatus Layout
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing substrate processing apparatus requires multiple main transfer mechanisms, increasing costs and potentially reducing transfer efficiency due to long transfer paths between processing portions.
Innovation Solution
A substrate processing apparatus configuration with three processing portions aligned away from a holding unit, utilizing two transfer robots to efficiently transfer substrates between the holding unit and processing portions, reducing the number of transfer robots and optimizing transfer paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If one main transfer mechanism is provided for each processing portion, then each processing portion can be accessed independently, but the cost of the substrate processing apparatus is increased
Solution Approach 1:
The single main transfer mechanism is designed to serve multiple processing portions through the introduction of transfer robots. The main transfer mechanism transfers substrates to transfer robots, which then distribute substrates to different processing portions, allowing one main transfer mechanism to perform the function of multiple dedicated transfer mechanisms.
Solution Approach 2:
Transfer robots are introduced as intermediary devices between the main transfer mechanism and processing portions. These transfer robots act as mediators that receive substrates from the main transfer mechanism and deliver them to appropriate processing portions, enabling efficient substrate distribution without requiring multiple main transfer mechanisms.
2Device complexity
If the number of main transfer mechanisms is reduced, then cost is decreased, but the transfer path becomes long and transfer efficiency may be reduced
Solution Approach 1:
The transfer function is segmented into two stages: first, the main transfer mechanism performs bulk substrate transfer to transfer robots; second, multiple transfer robots independently handle distribution to different processing portions. This segmentation allows the system to maintain short effective transfer paths while using fewer main transfer mechanisms.
Solution Approach 2:
The system introduces a new dimensional aspect to substrate transfer by employing transfer robots that can move substrates in multiple directions and positions. This adds operational flexibility and reduces the effective transfer distance from the main transfer mechanism to individual processing portions, maintaining high transfer efficiency despite using fewer main transfer mechanisms.
3Ease of manufacture
If three processing portions are located in a direction away from the holding unit, then the apparatus layout is optimized, but the number of transfer robots increases
Solution Approach 1:
The transfer robots are designed with multi-functionality to serve multiple processing portions. Each transfer robot can service multiple processing portions along the linear arrangement, reducing the total number of transfer robots needed compared to a configuration where each processing portion has its own dedicated transfer robot.
Data Source
AI summary
A first transfer robot carries a substrate into and out of a container. A second transfer robot receives and delivers the substrate from and to the first transfer robot, and carries the substrate into and out of a first processing portion through a first exit/entrance port. A third transfer robot receives and delivers the substrate from and to the second transfer robot, carries the substrate into and out of a second processing portion through a second exit/entrance port, and carries the substrate into and out of a third processing portion through a third exit/entrance port.