Substrate Transfer Position Correction via Sensor Feedback
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Solution Overview
Problem
The existing manual teaching operations for transfer units in semiconductor and liquid crystal display fabrication processes are time-consuming and prone to errors due to direct operator intervention, which affects the precise positioning of substrates during transfer.
Innovation Solution
An apparatus and method that utilize a position sensor, alignment unit, and teaching unit to measure and correct the transfer position of a transfer unit, including steps for measuring substrate positions, determining offset values, and aligning substrates using alignment protrusions and rotating mechanisms to accurately set the transfer position, thereby reducing the need for manual adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual teaching operation is used to set the transfer position, then the operator can directly adjust the hand position, but the operation time is long and errors are likely to occur
Solution Approach 1:
The patent replaces the manual mechanical adjustment system with an automated optical measurement system. A position sensor detects the substrate position on the hand, and a teaching unit automatically calculates and sets the transfer position based on measured data, eliminating manual mechanical jogging operations.
Solution Approach 2:
The system performs self-teaching by automatically measuring substrate positions and calculating transfer parameters without requiring operator intervention. The teaching unit uses measured position data to autonomously determine the correct transfer position, making the system self-configuring.
2Reliability
If manual teaching operation is used to set the transfer position, then the operator can directly adjust the hand position, but errors are likely to occur due to direct operator intervention
Solution Approach 1:
The patent replaces manual mechanical adjustment with automated sensor-based measurement and calculation. The position sensor and teaching unit work together to automatically determine accurate transfer positions, eliminating human error while maintaining operational simplicity through automated processes.
Solution Approach 2:
The system implements feedback by using the position sensor to continuously monitor substrate position on the hand, then feeding this information back to the teaching unit which automatically adjusts the transfer position settings. This closed-loop feedback ensures high reliability without complex manual operations.
3Productivity
If automated position measurement is used, then the teaching operation time is reduced, but additional components such as position sensor and teaching unit are required
Solution Approach 1:
The position sensor serves multiple functions: it measures substrate position during teaching operations, verifies positioning accuracy during normal operations, and provides data for automatic adjustment. The teaching unit integrates measurement, calculation, and control functions, reducing the need for separate dedicated components.
Solution Approach 2:
The teaching unit acts as an intermediary that processes data from the position sensor and translates it into control commands for the transfer mechanism. This intermediary layer simplifies the overall system architecture by consolidating control logic in a single unit rather than requiring complex direct coupling between sensors and actuators.
Data Source
AI summary
A substrate treating apparatus comprises: an alignment unit for aligning a substrate placed in a support unit in position; and a teaching unit for setting a transfer position for transferring the substrate onto the support unit of the transfer unit, wherein the teaching unit correcting a transfer position of the transfer unit based on a difference value between a first position of a substrate placed on a hand of the transfer unit when the transfer unit is transferring the substrate and a second position of a substrate placed on the hand of the transfer unit that picks up the substrate aligned to the support unit in position.