Substrate Transfer Chamber with Shutter Stack for Vacuum Throughput
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Solution Overview
Problem
Conventional cluster tools require separate transfer systems for substrates and shutter discs, leading to inefficiencies and the need to pump down vacuum when transferring workpieces between non-high vacuum portions.
Innovation Solution
A substrate processing module with a transfer chamber assembly that includes a shutter stack between processing regions, allowing a single transfer system to handle both substrates and shutter discs, and a central transfer device to move workpieces between the shutter stack and processing regions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate transfer systems are used for substrates and shutter discs, then each workpiece type can be transferred with dedicated equipment, but device complexity increases and operational efficiency decreases
Solution Approach 1:
The transfer system employs a universal gripper mechanism that can accommodate both substrates and shutter discs through interchangeable gripper tools. The substrate gripper has a flat gripping surface for substrates, while the shutter disc gripper has a gripping surface with a recessed portion for shutter discs. This multi-functional design allows a single transfer system to handle different workpiece types without requiring separate dedicated systems, thereby reducing device complexity while maintaining transfer reliability.
2Ease of manufacture
If shutter garage is located in non-high vacuum portion, then workpieces can be stored outside vacuum chamber, but vacuum must be pumped down when transferring workpieces
Solution Approach 1:
The patent introduces a transfer chamber as an intermediary component between the shutter garage (atmospheric pressure) and the processing chamber (high vacuum). The transfer chamber allows workpieces to be transferred from the shutter garage to the processing chamber without requiring the entire system to be pumped down. The isolation valve controls the vacuum state, allowing the transfer chamber to be at atmospheric pressure when receiving workpieces from the shutter garage, then isolated and pumped down before transferring to the processing chamber. This eliminates the time loss associated with pumping down the entire system while maintaining ease of manufacture and system configuration flexibility.
3Adaptability or versatility
If multiple types of carousels or gripping arms are used, then each workpiece type can be grasped with appropriate tooling, but device complexity and operational complexity increase
Solution Approach 1:
The system employs dynamically interchangeable gripper tools that can be quickly swapped on the transfer arm. The substrate gripper and shutter disc gripper are designed as interchangeable components that can be rapidly exchanged based on the workpiece type being transferred. This dynamic approach allows the system to adapt to different workpiece types without requiring multiple fixed carousels or gripping arms, thereby maintaining versatility while reducing operational complexity. The transfer arm itself remains constant, with only the gripper tool changing, simplifying the overall operation compared to switching between multiple specialized carousels.
Data Source
AI summary
Embodiments disclosed herein include a substrate processing module and a method of moving a workpiece. The substrate processing module includes a shutter stack and two process stations. The shutter stack is disposed between the process stations. The method of moving a workpiece includes moving a supporting portion from a first location to a shutter stack in a first direction, retrieving the workpiece from the shutter stack, and moving the supporting portion to a second location. The transfer chamber assembly and method allows for moving workpieces to and from the shutter stack to the two process stations. A central transfer robot of the substrate processing module is configured to grip both substrates and shutter discs, allowing for one robot when typically two robots would be required.