Substrate Transfer Teaching for Stage Position Error Compensation
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Solution Overview
Problem
Existing substrate processing systems face challenges due to individual positional errors in process module stages, which vary across different modules, affecting the accuracy of substrate transfer.
Innovation Solution
A substrate processing system with a processor that measures shift amounts between process module stages and substrates, correcting the positions of transfer devices to account for these errors, ensuring precise substrate placement across multiple stages.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If substrate transfer is performed using standard transfer devices, then the transfer operation can be completed, but the positioning accuracy deteriorates due to stage positional errors
Solution Approach 1:
The system performs preliminary teaching operations to establish the relationship between transfer device positions and actual stage positions before substrate transfer. The processor stores teaching position information for each stage, enabling the transfer device to compensate for stage positional errors during actual substrate transfer operations.
Solution Approach 2:
The system implements a feedback mechanism where the processor retrieves stored teaching position information based on the target stage, calculates corrected transfer positions by compensating for measured stage errors, and uses this corrected information to guide the transfer device for accurate substrate placement.
2Measurement precision
If individual stage position measurements are performed for each process module, then positioning accuracy can be improved, but the system complexity increases
Solution Approach 1:
The system divides the measurement and correction process into separate stages: first measuring and storing teaching position information for each process module stage individually, then using this pre-stored data to guide transfer operations. This segmentation allows accurate measurement without requiring complex real-time measurement systems during substrate transfer.
3Manufacturing precision
If correction values are stored for each stage, then transfer accuracy can be maintained, but the data management complexity increases
Solution Approach 1:
The processor serves multiple functions: it stores teaching position information, retrieves appropriate correction data based on target stages, calculates corrected transfer positions, and controls the transfer device. This multi-functionality consolidates data management within a single control unit, reducing overall system complexity despite managing multiple correction values.
Data Source
AI summary
A substrate processing system includes a load-lock module including load-lock module stages, a process module including process module stages, a vacuum transfer module that connects the load-lock module to the process module, a first transfer device that transfers substrates from the load-lock module stages to the process module stages, the first transfer device being provided in the vacuum transfer module, a second transfer device that transfers the substrates to the load-lock module stages, and a processor. The processor is configured to perform teaching a position at which the first transfer device receives the substrates from the load-lock module, teaching a position at which the first transfer device delivers the substrates to the process module, measuring shift amounts between the process module stages and the substrates mounted thereon, and correcting positions at which the second transfer device delivers the substrates to the load-lock module stages based on the measured shift amounts.