Substrate Carrier Transfer Synchronization for Continuous Loading
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Solution Overview
Problem
Existing substrate transfer systems in semiconductor and display manufacturing face inefficiencies in transporting carriers with substrates, particularly in the need to stop transfer units to manage loading and unloading processes.
Innovation Solution
A substrate transfer device and method that utilize a transfer unit, an upper interface unit, and a lower interface unit, all controlled by a single controller to enable continuous movement of the transfer unit and carrier without stopping, by synchronizing the movement of the transfer unit and the shuttle unit within an interface region.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the transfer unit stops to perform loading and unloading operations, then the substrate transfer accuracy is improved, but the manufacturing throughput decreases
Solution Approach 1:
The transfer unit continues to move continuously without stopping while performing loading and unloading operations. The interface units are positioned to transfer substrates during the motion of the transfer unit, eliminating idle stopping time and maintaining continuous productive action throughout the substrate transfer process.
Solution Approach 2:
The interface units are pre-positioned along the trajectory of the transfer unit to perform loading and unloading operations at optimal points during the transfer unit's motion. This preliminary positioning allows substrate operations to be executed during the transfer unit's movement rather than requiring the transfer unit to stop and reposition.
2Productivity
If multiple interface units are used to transfer substrates, then the manufacturing throughput is improved, but the device complexity increases
Solution Approach 1:
The substrate transfer system is divided into multiple interface units positioned at different locations along the transfer unit's trajectory. Each interface unit handles specific loading or unloading operations independently, allowing parallel substrate operations that increase throughput while maintaining modular, manageable complexity.
Solution Approach 2:
Multiple interface units are arranged in the spatial dimension along the transfer unit's path of motion. This spatial distribution allows simultaneous substrate operations at different positions, increasing throughput without requiring complex temporal coordination or control mechanisms.
3Productivity
If the transfer unit moves continuously without stopping, then the manufacturing throughput is improved, but the substrate transfer precision deteriorates
Solution Approach 1:
Interface units serve as intermediary mechanisms between the moving transfer unit and the substrate storage/processing locations. These interface units perform the actual substrate loading and unloading operations while the transfer unit maintains continuous motion, ensuring precision through the intermediary's stable positioning rather than relying on the moving transfer unit's positioning accuracy.
Data Source
AI summary
A substrate transfer device includes a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored, an upper interface unit configured to move the transfer unit, a lower interface unit configured to receive the carrier from the transfer unit, and a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.