Substrate Transfer Rollers for Thin Glass Rinsing Stability

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Solution Overview

Problem

Thin glass substrates and substrates with varying thicknesses face damage during transfer processes due to restricted rotation and pressure issues when using conventional roller conveyor systems, especially during rinsing and drying with liquids or gases.

Innovation Solution

A substrate transfer apparatus with multiple first and second transfer rollers and guide rollers, where the first rollers support the substrate's lower face and second rollers support the upper face only at the center, allowing for rotational freedom and minimizing contact with guide rollers, while guide rollers maintain substrate alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the substrate is held between upper and lower rollers to resist water pressure during rinsing, then the substrate is prevented from being pushed back, but thin substrates are likely to be cracked or broken due to restricted rotation and excessive pressure

Engineering Contradiction:
Improvesubstrate transfer stabilityVSAvoidsubstrate integrity
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The substrate width direction is divided into multiple support regions with rollers arranged at different positions. Multiple lower rollers support the lower face at different locations, while upper rollers support the upper face, creating segmented support zones that distribute pressure and allow localized rotation freedom for thin substrates

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the substrate receive different types of support: the lower face is supported by multiple rollers that allow rotation, while the upper face is supported by rollers that provide controlled restraint. This local differentiation of support characteristics enables both stability during rinsing and rotation freedom to prevent cracking

Inventive Principle:
Principle #3Local quality

2Reliability

If the upper roller weight is increased to prevent substrate from being swept away during rinsing, then transfer stability improves, but thin substrates cannot bear the load and are likely to be cracked or broken

Engineering Contradiction:
Improvesubstrate transfer stabilityVSAvoidroller pressure on substrate
Core Design Contradiction:
ReliabilityVSForce

Solution Approach 1:

The single heavy upper roller is segmented into multiple lighter upper rollers distributed across the substrate width. These multiple rollers collectively provide sufficient support force to prevent the substrate from being swept away, while each individual roller applies less localized pressure, preventing cracking of thin substrates

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The roller configuration changes from one heavy roller to multiple lighter rollers, altering the pressure distribution parameters. The total support force remains sufficient to resist rinsing flow, while the pressure per unit area on the substrate is reduced to safe levels for thin substrates

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If guide rollers are used to prevent substrate deviation during transfer, then transfer accuracy improves, but thin substrates are likely to be pressed against guide rollers and cracked or broken when they meander

Engineering Contradiction:
Improvesubstrate transfer accuracyVSAvoidsubstrate integrity
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The substrate width is segmented into multiple zones with rollers positioned at different locations, creating a distributed support system that reduces the substrate's tendency to meander and minimizes contact pressure with guide rollers while maintaining transfer accuracy

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The roller support provides localized stability at specific positions along the transfer path, allowing the substrate to maintain accuracy without being continuously pressed against guide rollers. This reduces the risk of cracking while preserving transfer precision

Inventive Principle:
Principle #3Local quality

4Adaptability or versatility

If a common transfer mechanism is used for substrates of different thicknesses, then device versatility improves, but substrates with varying thicknesses are more likely to be damaged due to pressure and rotation restrictions

Engineering Contradiction:
Improvetransfer mechanism compatibilityVSAvoidsubstrate integrity
Core Design Contradiction:
Adaptability or versatilityVSStrength

Solution Approach 1:

The roller transfer mechanism is designed with multiple rollers at different positions that can accommodate substrates of varying thicknesses. The system universally handles different substrate types by distributing support forces across multiple contact points, preventing damage while maintaining transfer functionality for diverse substrates

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The roller configuration allows for adaptation to different substrate thicknesses by maintaining a distributed support pattern. The multiple rollers can adjust to varying substrate profiles, providing appropriate support forces for each thickness while preventing rotation restrictions and damage

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentEP4468328A1Substrate transfer apparatus, and apparatus for processing substrate provided with substrate transfer apparatus
Publication Date: 2024.11.27 EBARA CORP
  • EP4468328A1 patent drawingFigure 1
  • EP4468328A1 patent drawingFigure 2
  • EP4468328A1 patent drawingFigure 3

AI summary

One object is to suppress a substrate in a rectangular shape from being damaged when the substrate is transferred through a process of spraying a liquid and/or a gas to the substrate. There is provided a substrate transfer apparatus configured to transfer a substrate in a rectangular shape. The substrate transfer apparatus comprises a plurality of first transfer rollers configured to support a lower face of the substrate; a plurality of first roller shafts, wherein at least three first transfer rollers are mounted to each of the first roller shafts; a motor configured to rotate the first roller shafts; a plurality of second transfer rollers configured to support an upper face of the substrate at only a center portion of the substrate in a width direction; a plurality of second roller shafts, wherein one second transfer roller configured to support only the center portion of the substrate in the width direction is mounted to each of the second roller shafts; and a plurality of guide rollers opposed to respective side faces of the substrate and configured to guide transfer of the substrate.