Substrate Transfer Timing Control for Supercritical Drying
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate processing apparatuses face issues with non-uniformity in transfer times and potential pattern collapse due to overlapping transfer timings when performing recipes with different processing times in parallel, particularly during the transition from a liquid film formation to supercritical drying.
Innovation Solution
A substrate processing system with a control device that adjusts the start timing of transfer processes to ensure non-overlapping transfer periods, using multiple transfer devices and units to manage wafers with different processing times, ensuring synchronized processing by determining optimal start times for subsequent recipes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple recipes with different processing times are performed in parallel, then productivity is improved, but non-uniformity in transfer times occurs and pattern collapse may happen
Solution Approach 1:
The system dynamically adjusts the start timing of recipe execution based on real-time transfer status. When a substrate is being transferred, the controller delays the start of subsequent recipes until the transfer completes, ensuring uniform transfer timing while maintaining parallel processing capability for other substrates.
Solution Approach 2:
The controller monitors the transfer status of substrates and uses this feedback information to determine when to start subsequent recipes. This feedback mechanism ensures that recipe start timing is synchronized with transfer completion, preventing pattern collapse while maximizing productivity.
2Reliability
If transfer timing is delayed to prevent overlap, then pattern collapse is prevented, but loss of time increases
Solution Approach 1:
The system applies partial delay only when necessary - specifically when a substrate transfer is in progress. Instead of uniformly delaying all recipe starts, the controller selectively delays only those recipes that would cause transfer overlap, minimizing time loss while ensuring reliability.
Solution Approach 2:
The controller checks transfer status before starting a new recipe, performing a preliminary verification to determine if delay is needed. This preliminary action prevents unnecessary delays while ensuring that recipes only start when transfer conditions are safe, balancing reliability and time efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively suppresses non-uniformity in transfer times and prevents pattern collapse by coordinating transfer timings, enhancing yield and efficiency in substrate processing.
Implementation Method 1
The multiple drying units are configured to dry the substrate by bringing the substrate having the liquid film formed on the surface thereof into contact with a supercritical fluid
Data Source
AI summary
A substrate processing apparatus 1 includes a controller 61 configured to perform a first recipe and a second recipe in parallel. Each of the first recipe and the second recipe includes a first transfer processing of transferring a substrate from a transit unit 14 to a liquid processing unit 17, a liquid processing, a second transfer processing of transferring the substrate from the liquid processing unit 17 to a drying unit 18 and a drying processing. The controller 61 determines, while the first recipe on a first substrate in substrates is being performed, when the second recipe on a second substrate in the substrates is started, a start timing of the first transfer processing of the second substrate such that a time period of the second transfer processing of the first substrate does not overlap with a time period of the second transfer processing of the second substrate.