Substrate Transfer Module With Vacuum Shutter Stack Handling
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Solution Overview
Problem
Conventional cluster tools require multiple carousel systems or gripping arms to handle both substrates and shutter discs, leading to inefficiencies and the need to break vacuum when transferring workpieces, which increases processing time and costs.
Innovation Solution
A substrate processing module with a central transfer device that includes transfer arms capable of moving both substrates and shutter discs using the same system, with a shutter stack positioned in a high vacuum environment to minimize vacuum disruptions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple carousel systems or gripping arms are used to handle both substrates and shutter discs, then the workpiece handling capability is improved, but the device complexity increases
Solution Approach 1:
The transfer arm is designed with a universal gripping mechanism that can handle both substrates and shutter discs using the same basic structure. The gripping arm includes fingers that can adapt to different workpiece types, eliminating the need for separate carousel systems for substrates and shutter discs.
Solution Approach 2:
The transfer system is segmented into modular components including the transfer arm, gripping fingers, and support structures. This segmentation allows the same transfer arm to be configured for different workpiece types by adjusting or replacing specific gripping components rather than requiring entirely separate systems.
2Ease of operation
If shutter garages are located in non-high vacuum portions, then the storage accessibility is improved, but vacuum disruptions occur when transferring workpieces
Solution Approach 1:
The shutter garage is merged with the high vacuum processing chamber, creating a unified vacuum environment. This integration allows shutter discs to be stored and transferred without breaking vacuum, as the garage becomes part of the vacuum system rather than a separate atmospheric zone.
Solution Approach 2:
A vacuum-compatible transfer mechanism acts as an intermediary between the shutter garage and processing areas. This intermediary system enables workpiece transfer while maintaining vacuum integrity, avoiding the need to pump down and pump up the vacuum system during transfers.
3Adaptability or versatility
If multiple types of carousels or gripping arms are used, then the workpiece handling versatility is improved, but the manufacturing cost increases
Solution Approach 1:
A single universal transfer arm design replaces multiple specialized carousel systems. The transfer arm can be configured to handle different workpiece types through adjustable gripping mechanisms, reducing the total number of components needed and lowering manufacturing costs.
Solution Approach 2:
The system uses homogeneous materials and design approaches across the transfer mechanism components. By standardizing the transfer arm structure, gripping fingers, and support elements, manufacturing complexity and cost are reduced while maintaining versatility through configuration rather than component diversity.
Data Source
AI summary
Embodiments disclosed herein include a substrate processing module and a method of moving a workpiece. The substrate processing module includes a shutter stack and two process stations. The shutter stack is disposed between the process stations. The method of moving a workpiece includes moving a supporting portion from a first location to a shutter stack in a first direction, retrieving the workpiece from the shutter stack, and moving the supporting portion to a second location. The transfer chamber assembly and method allows for moving workpieces to and from the shutter stack to the two process stations. A central transfer robot of the substrate processing module is configured to grip both substrates and shutter discs, allowing for one robot when typically two robots would be required.