Substrate Transfer Interface With In-Process Wireless Robot Charging
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Solution Overview
Problem
Existing substrate transfer systems in semiconductor manufacturing face inefficiencies due to the need for separate charging ports for mobile robots, disrupting the transfer process and reducing overall manufacturing efficiency.
Innovation Solution
A substrate transfer system with a mobile robot and mobile robot interface device equipped with a power feeder and receiver, actuators, identification tags, and a controller, enabling wireless charging during substrate transfer by adjusting the distance between the power feeder and receiver using actuators controlled by the controller.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If mobile robots use battery power for movement, then they can operate autonomously between semiconductor facilities, but they require separate charging ports that disrupt the transfer process and reduce manufacturing efficiency
Solution Approach 1:
The patent combines the charging function with the substrate transfer interface by integrating a power feeder into the mobile robot interface device. This allows the mobile robot to be charged during the substrate transfer process itself, merging two previously separate operations (charging and substrate handling) into a single integrated process, thereby eliminating the need for separate charging ports and maintaining manufacturing efficiency
2Duration of action of moving object
If separate charging ports are provided for mobile robots, then robots can be recharged, but the charging process disrupts the substrate transfer process and reduces overall manufacturing efficiency
Solution Approach 1:
The patent enables continuous useful action by allowing the mobile robot to be charged during the substrate transfer process. The power feeder is activated when the robot is positioned at the interface device, so charging occurs concurrently with substrate handling operations rather than as a separate interrupting step, thereby eliminating charging disruption time while maintaining continuous manufacturing flow
3Productivity
If wireless charging is implemented during substrate transfer, then charging efficiency is improved, but precise alignment between power feeder and receiver is required
Solution Approach 1:
The patent employs feedback mechanisms through identification tags and tag readers that enable the system to detect and verify the position of the mobile robot relative to the interface device. The controller uses this feedback information to activate the power feeder at the appropriate moment when alignment is achieved, ensuring precise wireless charging activation while maintaining high charging efficiency during the substrate transfer process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances manufacturing efficiency by allowing wireless charging during substrate transfer, eliminating the need for additional charging steps and optimizing the alignment and charging process.
Implementation Method 1
the power feeder is configured to supply an electromotive force to the power receiver using electromagnetic induction
Data Source
AI summary
A substrate transfer system and method includes a mobile robot configured to handle a substrate carrier and comprising a power receiver; a mobile robot interface device configured to handle the substrate carrier and comprising a power feeder configured to supply an electromotive force to the power receiver of the mobile robot; at least one of: a first actuator configured to move the power feeder to adjust a distance between the power feeder and the power receiver and a second actuator configured to move the power receiver to adjust a distance between the power feeder and the power receiver; an identification tag disposed on any one of the mobile robot and the mobile robot interface device; a tag reader configured to recognize the identification tag; and a controller configured to control an operation of the mobile robot and to control an operation of the first and/or second actuator and the controller is further configured to control the first and/or second actuator to adjust the distance between the power feeder and the power receiver.