Substrate Transmittance Inspection With Align-Key Deviation Correction
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Solution Overview
Problem
The challenge of accurately determining the physical characteristics of large substrates during display device manufacturing is exacerbated by substrate sagging, which complicates transmittance inspection due to movement deviations between light-emitting and light-receiving parts in existing inspection apparatuses.
Innovation Solution
An inspection apparatus with independently movable light-emitting and light-receiving parts, controlled by a separate moving mechanism, uses a camera to align and focus on align keys to correct positional and separation deviations, enabling accurate transmittance measurement across the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the light-emitting part and light-receiving part move separately to inspect enlarged substrates, then the inspection coverage is improved, but movement deviation occurs between the two parts
Solution Approach 1:
An align key is introduced as an intermediary reference element that is commonly observable by both the light-emitting part and light-receiving part. The align key serves as a mediator to establish a common reference frame, allowing the two separately moving parts to coordinate their positions and maintain measurement accuracy despite independent movement.
Solution Approach 2:
The system continuously captures images of the align key using both the light-emitting part and light-receiving part, and uses this feedback information to detect and correct any movement deviations. The real-time imaging feedback allows the system to maintain precise alignment between the two parts throughout the inspection process.
2Productivity
If substrates with long sides are used to increase manufacturing efficiency, then productivity is improved, but substrate sagging occurs making physical characteristics determination difficult
Solution Approach 1:
The system replaces direct mechanical contact measurement methods with optical imaging to measure substrate physical characteristics. By using light to capture images of align keys and substrate features, the system avoids mechanical contact that could be affected by substrate sagging, enabling accurate measurements of large, sagging substrates.
Solution Approach 2:
The system transitions from direct physical measurement in three-dimensional space to two-dimensional image capture and analysis. By capturing images of align keys and substrate features from above, the system can accurately determine physical characteristics without being affected by the substrate's sagging in the vertical dimension.
3Device complexity
If the light-emitting part and light-receiving part are positioned to overlap in plan view, then transmittance measurement is simplified, but alignment precision requirements increase
Solution Approach 1:
The align key serves as a common intermediary reference that both the light-emitting part and light-receiving part can observe. This shared reference simplifies the alignment process by providing a clear target for positioning, reducing the complexity of coordination between the two parts while maintaining high alignment precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus ensures precise transmittance measurement by correcting movement deviations, allowing for accurate inspection of substrates with long sides and reducing error rates.
Implementation Method 1
a light-emitting part LP that emits light LB, and a light-receiving part RP disposed to be spaced apart from the light-emitting part LP in a first direction D1 and receiving the light LB emitted from the light-emitting part LP
Implementation Method 2
a camera CA attached to one side of the light-receiving part RP, disposed to be spaced apart from the align key AK1 in the first direction D1, and capturing the align key AK1
Data Source
AI summary
A inspection apparatus includes a light-emitting part that emits light, a first align key attached to one side of the light-emitting part, a light-receiving part disposed to be spaced apart from the light-emitting part in a first direction and receiving the light emitted from the light-emitting part, and a camera attached to one side of the light-receiving part, disposed to be spaced apart from the align key in the first direction, and capturing the first align key.