Substrate transport apparatus, substrate processing apparatus, and dew condensation suppression method
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Dew condensation in substrate transport mechanisms disrupts normal operation due to moisture from rinse water, leading to operational issues in substrate processing apparatuses.
Innovation Solution
A substrate transport apparatus with a drive mechanism that supplies air into the casing to suppress dew condensation, using air cylinders and pipes to control the movement of support arms and circulate air within the casing, thereby reducing humidity and preventing condensation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If air is supplied into the casing to suppress dew condensation, then reliability is improved, but device complexity increases
Solution Approach 1:
The air supply system serves dual purposes: it provides driving force to the air cylinder for substrate transport operations and simultaneously suppresses dew condensation within the casing by maintaining positive air pressure and enabling air circulation. This multi-functionality resolves the contradiction by avoiding additional dedicated components for dew condensation prevention.
Solution Approach 2:
The existing air supply infrastructure self-regulates to prevent dew condensation through pressure control. The air cylinder system automatically maintains positive pressure within the casing during operation, which prevents moisture condensation without requiring external intervention or additional control mechanisms.
2Reliability
If air circulation is increased to suppress dew condensation, then reliability is improved, but energy consumption increases
Solution Approach 1:
The air circulation serves dual purposes: it provides necessary air flow for substrate transport operations through the air cylinder and simultaneously suppresses dew condensation by maintaining air movement and positive pressure within the casing. This eliminates the need for separate energy-consuming dew prevention systems.
Solution Approach 2:
The air supply operates continuously during substrate transport, maintaining constant air flow and positive pressure within the casing. This continuous action prevents dew condensation formation throughout the operational cycle without requiring intermittent or additional energy input.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The air circulation effectively suppresses dew condensation, ensuring continuous operation of the substrate transport mechanism by maintaining a dry environment and minimizing interference with air cylinders and other components.
Implementation Method 1
The drive mechanism is capable of supplying air into the casing
Implementation Method 2
dew condensation may occur in the transport mechanism so that the transport mechanism may not be normally operated
Data Source
AI summary
A substrate transport apparatus includes a substrate holding unit configured to hold a substrate; a casing; and a drive mechanism at least partially provided within the casing and configured to drive the substrate holding unit using air. The drive mechanism is capable of supplying air into the casing.